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Roll to roll PECVD graphene preparation equipment

모델명 : CY-OTF-1200X-III-PE300-RR
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Roll to roll PECVD graphene preparation equipment for continuous production of flexible transparent electrodes，Roll to roll PEVCD is a roll-to-roll tubular furnace system for graphene preparation. The equipment consists of coil to coil copper foil rewinding and placing sealing device, 1200°C tube furnace with three temperature zones and vacuum unit. It can be used for large-scale growth of high quality graphene and other two-dimensional materials

Roll to roll PEVCD applied range:

It can be used in screens of computer and cellphone, ultra-light flexible solar cells, new luminescent devices and other film electronics fields.

Roll to roll PEVCD technical parameters:

 

Performance specifications and basic configurations

Product   name

Roll   to roll PEVCD

Product   model

CY-OTF-1200X-III-PE300-RR

1000W Plasma source

● Output power：50-1000W  Maximum adjustable ±1%
  ● RF rate： 13.56MHz，stability±0.005%
  ● dB：≤55DB
  ● Cooling mode ：forced air cooling
  ● Input power：1KW  AC 220V

Three proton flow meter control system

● Voltage：AC220V/50Hz
  ● Power：23W
  ● PLC touch screen control
  ● Size of mixing tank：φ80*120mm
  ●Operating temperature：5~45℃
  ● Maximum pressure: 3x106 Pa
  ● Precision : ±1.5% FS
  ● Linear: ±（0.5-1.5）%F.S.
  ● Repeated accuracy: ±0.2%F.S.
  ● Range of flow:
  ● The first path : 1~50 SCCM （Methane calibration）
  ● The second path: 1~200 SCCM （Hydrogen   calibration）
  ● The third path: 1~200 SCCM （Argon calibration）
  Other options are available for gas type calibration according to customer   requirements

Vacuum measure unit

●Model：PCG-800
  ● Indication range：3.8E-5 to 1125torr
  Precision：
  ● 5×10-4 … 1×10-3 mbar (N2) % of reading ±50
  ● 1×10-3 … 100 mbar (N2) % of reading ±15
  ● 100 … 950 mbar % of reading ±5
  ● 950 … 1050 mbar % of reading ±2.5

Low vacuum unit

● It is composed of double-rotating mechanical pump,   double-layer vertical oil mist filter (PE material), resistance vacuum gauge   and connecting pipe joint 

● Suction rate of vacuum pump≥4.4L/s
  ● Limit vacuum degree 10-1Pa
  ●Vacuum gauge measuring range 10-1Pa-105 Pa

Reel-to-reel sealing devices for copper foil

·           ● Coil to coil winding and unwinding mechanism   is used to move copper foil in and out of the material, and the moving speed   of copper foil is adjustable from 1-400mm/min.
  ● Configure a roll of test copper foil

● The winding and unwinding mechanism is placed in the   vacuum chamber at both ends of the tube furnace to ensure that the copper   foil can move under sealed growth conditions and achieve large-scale   preparation
  ● A cooling device is set between the winding mechanism   and the tubular furnace for rapid cooling of copper foil.

Product size

About 2400*800*1250mm

Product weight

About 720kg

Quality certificate

CE certification is optional for electrical components

Warranty period

Special note:  

1. Consumables such as heating element, quartz tube, sample crucible,   etc. are not included.  

2. Damage caused by corrosive and acidic gases is not covered by the   warranty.