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Single heating zone rotary PECVD graphene preparation tube furnace

모델명 :
제품 견적문의

상품상세정보

Single heating zone rotary PECVD, equipped with vacuum automatic feeder, and KF40 interface reserved at the end of the furnace tube can be connected to the receiving tank. The feeder adopts screw feeding, the powder can be fed into the furnace tube at a rated rate, and the feeding rate can be changed by adjusting the rotary speed. It can realize the continuous coating and modification of powder materials by PECVD method under the atmosphere protection environment. The receiving tank can collect the processed powder under the atmosphere protection environment.

The equipment is equipped with 100W RF power at 13.56MHz. It can generate plasma in vacuum. High-energy plasma can activate the sample surface, effectively enhance the reaction effect and increase the reaction rate. This auxiliary method is widely used in scientific experiments such as graphene preparation and particle coating.

This equipment is especially suitable for granular sample experiments. Through mechanical transmission, it can control the continuous rotation of the working tube 360° with adjustable rotation speed, so that the materials in the tube are continuously stirred and mixed, and fully contact with the gas and plasma, so that the reaction of the sample is more uniform and stable.

Technical parameters of rotary PECVD tube furnace:

RF power supply

Output Power

150W

Output accuracy

±1%

RF frequency

13.56MHz

RF stability

±0.005%

Cooling method

  Air-cooling

1200℃ Single heating zone tube furnace

Supply voltage

AC220V, 50Hz

Maximum power

2KW

Heating zone

Single heating zone 200mm

Working temperature

Maximum 1200℃, continuous operating temperature should be ≤1100 ℃

Temperature accuracy

± 1 ℃

Temperature control method

AI-PID 30-stage process curve, can store multiple

Three temperature zone independent control, with overheat and thermocouple failure protection

Furnace tube material

High purity quartz

Furnace tube size

Dia. 50x800mm

Sealing method

Vacuum stainless steel flange, KF16 flange

Adjustable speed

0-20rpm

Furnace tilt angle

0-15°

Vacuum pump

Rotary vane mechanical pump

Ultimate vacuum

1.0E-1Pa

Feeding method

Vacuum funnel and screw feed