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공정장비

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Sliding 1200 degree Tube Furnace with three gas mixer,vacuum pump for CNT Preparation

모델명 : CY-T1200-80IC

Features

1.Fast heating and cooling, maximum rate: 0-100°c/min

2.Multi-function: CVD experiment, growth of graphene, crystalline silicon substrate coating,etc.

3.LED display or LCD touch screen

4.Slide type, can manual sliding or electric sliding

5.Can connect with vacuum pump and atmosphere furnace.

Model	CY-T1200-80IC
Display	LED
Limiting temperature	1200℃
Working temperature	≤1200℃
Heating rate	Suggestion 0~20℃/min
Temperature zone	Single
Temperature accuracy	±1℃
Chamber size	Φ80×1200(mm)
Heated length	440mm
Furnace structure	High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
	Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
	Sliding flange assembly are made of stainless steel.
Heating element	Imported alloy heating wire
Thermal couple	K Type
Rated power	1.5 Kw
Temperature control	PID automatic control via SCR power control
Chamber material	Alumina Fiber
Flange connection	Stainless steel flange
Sliding Rail	800mm long sliding rail is installed with one end flange to make loading & unload sample easy.
Mass Flow meters	Three precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically.
	MFC 1: Gas flow range from 0~100 sccm
	MFC 2 : Control range from 0~200 sccm
	MFC 3 : Control range from 0~200 sccm
	Flowing rate accuracy: ±1% FS
	Each gas channle has a SS needle valve for easy on/off
	The flow rate is adjustable from the MFC panel
Vacuum pump and valve	Pumping rate: 8m3/h 50Hz; 9.6m3/h 60Hz.
	Vacuum degree:10Pa
	KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
Working voltage	AC110-480V 50/60 Hz