Smile, Smart, Speed

고객의 만족을 위하여 최선을 다하는 기업, 정문사이언스입니다.

공정장비

HomeHOME > 회사소개 >공정장비

Three temperature zone PECVD graphene preparation

모델명 :
제품 견적문의

상품상세정보

The plasma enhancement CVD system consists of plasma generator, three-temperature tubular furnace, radio frequency power supply and vacuum system. Plasma enhanced CVD system in order to make the chemical reaction at lower temperature, the use of plasma activity to promote the reaction, so the CVD is called plasma enhanced chemical vapor deposition method (PECVD), the PECVD graphene film preparation equipment with the radio frequency output of 13.56Mhz make film atoms gas ionization, forming plasma, using plasma strong chemical activity, improve the reaction conditions, using the plasma activity to promote the reaction, deposit the desired film on the substrate.

PECVD application area:

Plasma-enhanced CVD system can be used in: graphene preparation, sulfide preparation, nanomaterials preparation and other test sites. SiOx, SiNx, amorphous silicon, microcrystalline silicon, nanosilicon, SiC, diamond-like films can be deposited on the surface of sheet or similar shapes, and p-type and n-type doped films can be deposited. The deposited films have good uniformity, tightness, adhesion, and insulation. It is widely used in cutting tool, high precision mold, hard coating, high duan decoration and other fields

PECVD technical parameters in the three-temperature zone:

Product   name

PECVD

Product   model

CY-PECVD-T01

Three   temperature area pipe furnace

Operating   temperature: 0-1100℃

Temperature   control accuracy: ± 1℃

Temperature   control mode: AI-PID 30 section process curve, which can store multiple   pieces

Furnace   tube material: high-purity quartz

Furnace   tube size: φ 50mm I.D x 1400mm L

Heating   temperature area: 200mm + 200mm + 200mm in the three-temperature area

Sealing   method: stainless steel vacuum flange

Maximum   vacuum degree: 4.4E-3Pa

RF power   supply

Output   power: 0-300W maximum adjustable ± 1%

RF   frequency: 13.56MHz, stability ± 0.005%

noise:≤55DB

Cooling:   air cooling

Mass flowmeter

Three-way   mass flowmeter

Valve   type: stainless steel needle valve

Number   of air roads: three roads

Pressure   range: -0.15Mpa~0.15Mpa

range

1~200   SCCM

1~200   SCCM

1~500   SCCM

Flow   control range: ± 1.5%

Gas   path material: 304 stainless steel

Pipe   interface: 6.35mm card sleeve connector

Vacuum and sub-atmospheric system

Equipped with a molecular pump system, using one-click operation

600L/S

Water cooling   system

CW-3200

Voltage

220V   50HZ