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공정장비

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Two-dimensional molybdenum sulfide growth equipment

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상품상세정보

The two-dimensional material growth device is composed of a preheating furnace, a reaction furnace, a vacuum system, a gas supply system, and a sliding rail support. The preheating furnace can be used to preheat and evaporate the solid state source, and the reaction furnace can provide the thermal environment required for the reaction. Both electric furnaces are mounted on the slide rail support, which can realize rapid temperature rise and fall, and increase the efficiency of the experiment. Thermocouple temperature measurement is provided in the furnace tube to precisely control the reaction conditions. All circuits are controlled by high-definition full-color touch screen, which is easy to operate and easy to use.

The gas supply system adopts two-channel mass flowmeter, which has precise flow control and simple and intuitive operation. The vacuum system adopts high-quality two stage rotary vane vacuum pump with the vacuum degree of 10E-1Pa, which fully meets the needs of CVD crystal growth experiments.

Two-dimensional molybdenum sulfide growth equipment application:

This product is mainly used in growth experiments of two-dimensional materials by CVD method, especially for the preparation of two-dimensional molybdenum sulfide.

Two-dimensional molybdenum sulfide growth equipment technical parameters:

Preheating furnace

Model

CY-O1200-100I-T-S

Chamber length

300mm

Heating zone length

200mm

Constant temperature zone

100mm

Working temperature

01100

Temperature control accuracy

±1

Temperature control mode

30 or 50 segment program temperature   control

Display mode

LCD (HD full color touch   screen)

Power supply

AC:220V 50/60Hz

Single heating zone tube furnace

Model

CY-O1200-100I-T

Chamber length

440mm

Heating zone length

400mm

Constant temperature zone

200mm

Working temperature

01100

Temperature control accuracy

±1

Temperature control mode

30 or 50 segment program temperature control

Display mode

LCD (HD full color touch screen)

Power supply

AC:220V 50/60Hz

Furnace tube

Tube material

High purity quartz

Tube length

Φ100mm×1800mm

Sealing method

304 stainless steel vacuum water cooled flange

Flange interface

1/4" ferrule connector

Gas supply system

Flowmeter

Two-channel mass flowmeter

Flow range

MFC1 range: 0~200SCCM 

MFC2 range: 0~200SCCM

Measurement accuracy

±1.5% F.S

Repeatability

±0.2% FS

Linear precision

±1%F.S.

Response time

≤4s

Work pressure

-0.15Mpa~0.15Mpa

flow control

LED highlight digital tube display, button adjustment

Each channel gas contains a needle valve for individual   control

Intake interface

Can be connected to 1/4NPS or 6mm outer diameter stainless   steel tube

Outlet interface

Can be connected to 1/4NPS or 6mm outer diameter stainless   steel tube

Connection method

Double ferrule connector

working temperature

5~45℃

Exhaust system

Mechanical pump

Rotary vane pump

Pumping rate

1.1L/S   

Exhaust interface

KF16

Vacuum measurement

Resistance gauge

Ultimate vacuum

1.0E-1Pa

Power supply

AC:220V 50/60Hz

Pumping interface

KF16

Sliding Rail

Rail length

1.8m~2m

It can realize the sliding of the length of one furnace position of two furnaces, and realize the rapid temperature rise and fall.