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공정장비

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Wafer level large-size molybdenum disulfide preparation furnace

모델명 : CY-O1200-120III-IC-3Z-MoS2
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상품상세정보

This equipment is a wafer level large-size molybdenum disulfide preparation device designed based on CVD principles. It includes a three-zone tube furnace, a specially designed furnace tube and a set of supporting gas paths. The equipment can uniformly release the reaction gas into the furnace tube through a specially designed pipeline to ensure the consistency and uniformity of the product on the back-end wafer. It is the best choice for molybdenum disulfide preparation experiments.

Technical parameters:

Product model

CY-O1200-120III-IC-3Z-MoS2

Furnace tube material

High purity quartz

Furnace tube size

External large quartz tube φ120mm x1000mm

Internal small quartz tube φ25mm x820mm x7

Temperature zone length

Three heating zone 200mm+200mm+200mm

Temperature control accuracy

±1℃

Temperature curve

Independent temperature control in three temperature zones, each temperature zone can be set with 30-segment time temperature curve

Operating temperature

0~1150℃

Heating rate

≤10℃/min

Intake system

Three-channel mass flow meter

Ar gas 0~500sccm

N2 gas 0~200sccm

H2 gas 0~200sccm

Equipped with seven channels of gas separation, gas mixing gas path.

Furnace pipe flange

Stainless steel water-cooled flange, equipped with KF16 vacuum interface, mechanical vacuum gauge and stainless steel needle valve

Power requirements

AC 220V 50Hz 4kW

Control mode

7-inch touch screen

Vacuum pump

Dual stage rotary vane vacuum pump

Vacuum

Theoretical ultimate vacuum degree 10^-1Pa