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Compact plasma sputtering &evaporation coater with thin film monitor and vacuum pump-CY-1100X-SPC-16H

모델명 : CY-1100X-SPC-16H
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상품상세정보

CY-1100X-SPC-16H DC sputtering coater is multi-function laboratory coater which has plasma sputtering and evaporation coating two function,KF 25 port allows user connect with turbo pump or rotary vacuum pump to achieve different coating processing.It widely used for ITO evaporation and other metalic coating.

Model No.

CY-1100X-SPC-16H

Target dimension

Φ50mm

Sample stage

Φ50mm

Chamber dimension

Φ160*110mm

Vacuum degree

10Pa~10-3Pa

Maximum amper

50mA

Max setting time

9999s

Max voltage

1600VDC,adjustable

Vacuum pump

Rotary vacuum pump: 10-100Pa
     Turbo pump system: 10-3Pa

Thin film monitor power

DC 5V, 400mA

Resolution

±0.03Hz(5-6MHz),0.0136Å (Al)

Accuracy

±0.5% thickness+1

Measured speed

100mS~1s/Time, adjustable

Measured range

500000Ã(Al)

Sensor type

Quartz 6MHz

Display

LED Display include

Analog output

8 bite PWM output

Working voltage

AC 220V, 50Hz