제주장학재단

Product name

film thickness   monitor

Product model

CY-FTM60

Main features

1.  This machine can be connected to a computer.

2.       The   display has the advantages of simple interface, intuitive, reasonable,   convenient and fast operation, etc. It can visually display the measured film   thickness, rate, frequency, percentage of PWM control output and other   working states.

3.      You can   set the gating time, output mode, rate algorithm, material parameters, output   range and communication parameters through software or display instrument,   and write the related data to Excel file.

Technical   parameters

monitoring module

1.  Power supply: DC 5V (± 10%), maximum current 400mA

2.  Frequency resolution: ± 0.03Hz

3.  Film thickness resolution: 0.0136Å (aluminum)

4.   Accuracy of film thickness: ± 0.5%,   depends on process conditions, especially the position of the sensor,   material stress, temperature and density

5.    Measurement   speed: 100ms-1s / time, can be set

6.  Measuring range: 500000Å (aluminum)

7.  Standard sensor crystal: 6MHz

8.   Computer interface: RS-232 / 485   serial interface (baud rate 1200, 2400, 4800, 9600, 19200, 38400 can be set,   data bit: 8, stop bit: 1, check: none)

9.   Analog output: 8-bit resolution, PWM   pulse width modulation output (open collector or internal 5V output)

10.  Working environment: temperature 0-50 ℃, humidity 5% -85% RH, no condensed water beads

11.  Dimensions: 90mm × 50mm × 18mm

CY-FTM60 display instrument

1.      Input power: AC 220V ± 10%

2.      Output power: DC 5V 3A

3.      Display: 12 × 2 digital tube and LED

4.         Communication   port: RS-485 (baud rate 1200, 2400, 4800, 9600, 19200, 38400 can be set, data   bit: 8 bit, stop bit: 1 bit, parity: none)

5.        Dimensions: 182mm   × 65mm × 160mm

CY-FTM  probe

1.  Applicable   chip frequency: 6MHz

2.  Applicable   chip size: Ø14mm

3.    Mounting flange: CF35

4.    Cooling water pipe: Ø3mm, length   300mm, 500mm, 1000mm

5.    Cooling water pressure: <0.3MPa

6.    Pneumatic baffle road tube: Ø3mm

7.    Compressed air pressure:   <0.8MPa,> 0.5MPa

8.  Baking   temperature: water-passing state <200 ℃,   no water-passing flange <100 ℃

9.    Electrical interface: BCN socket