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공정장비

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Multi arc ion coating equipment

모델명 :
제품 견적문의

상품상세정보

Multi-arc ion plating is the use of gas discharge or partial ionization of evaporated substances, while gas ions or particles of evaporated substances are bombarded, the evaporated substances or reactants are deposited on the substrate. Ion plating combines the glow discharge, plasma technology and vacuum evaporation organically, which not only significantly improves the film quality, but also expands the application range of the film. It has the advantages of fast evaporation rate, strong film adhesion, good diffraction, and extensive film materials. It is very suitable for plating hard protective film such as TiN. At the same time, because it can change the color of the film by controlling the atmosphere, and the film is firmly combined with the substrate, it can also be used to make decorative films of various colors.

Features of multi arc ion coating equipment

This equipment is equipped with two multi-arc targets, which are placed on both sides of the chamber. Cooperating with the planetary sample stage can effectively improve the coating efficiency and improve the effect.

The coating instrument also adopts an integrated design, the chamber and the electric control part are separated on the left and right, which realizes the separation of water and electricity, and effectively guarantees the safety of users.

Technical parameters of multi arc ion coating equipment:

Model

CY-MIOP500S-2TA

Vacuum chamber

Water cooled stainless steel chamber;

φ500mm x 490mmH;

Front door type, φ 100 mm quartz observation window;

Built in two sets of infrared heating lamps, can be used for baking and degassing the chamber;

Multiple CF interfaces are reserved for installation of multi-channel film thickness meter

Gas system

Mass flow meter: Ar gas 0~200sccm, N2 gas 0~200sccm

 other flow or gas can be customized

Power supply

AC 220V;50Hz;10kW

Control system

15" touch screen configuration control software

Multi arc target

Quantity and SPEC

2-set;3inches

Installation method

Chamber side, opposite

Working current

0~150A

Target thickness

50mm, Min. 20mm

Sample stage

Specification

Planetary hanger

Number of samples

There are 6 hanging points on each hanger, totally 6 hangers

Rotation speed

Revolution speed 1~20rpm

Vacuum system

Model

CY-GZK103-A

Molecular pump

Turbo molecular pump

Backing pump

Double stage rotary vane pump

Pumping

molecular pump: 600L/S

Comprehensive   pumping performance: 30 minutes vacuum degree up to: 5×10E-3Pa

Rotary vane pump: 1.1L/S

Ultimate vacuum

5×10E-4Pa

Extraction interface

KF40

Exhaust interface

KF16

Vacuum measurement

Composite vacuum gauge