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공정장비

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High vacuum RTP rapid annealing furnace

모델명 : CY-O1000-200I-T-RTP
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상품상세정보

This product is a high vacuum RTP rapid annealing furnace, heated by the halogen lamp, and can be used for rapid thermal annealing, rapid thermal oxidation, rapid thermal nitriding, silicidation, diffusion, compound semiconductor annealing, annealing after ion implantation, electrode alloying, crystallization and Densification, alloy melting point analysis, film deposition, etc.

The equipment is mainly composed of quartz vacuum chamber, vacuum pump unit, water cooling unit and control system. The control system adopts intelligent temperature control meter control and touch screen operation. Its digital parameter interface and automatic operation mode provide users with an excellent research and development platform. The furnace chamber uses a left-right sliding way, and the distance from the sample is flexibly adjustable.

The equipment is equipped with a bipolar rotary vane pump, which has the advantages of small size, low noise, and no oil pollution.

high vacuum RTP rapid annealing furnace technical parameters:

Model

CY-O1000-200I-T-RTP

Furnace   tube specifications

Inner   diameter 100mm, heating temperature zone 400mm, total length 550mm

Material:   high purity quartz

Heating   rate

0-200℃/s

Cooling   rate

Above   200℃≤25min

Heating   element

Halogen   lamp

Vacuum   interface

KF16

Intake   port

Pagoda   head, with 10mm outer diameter air hose

Flange   specification

φ100   stainless steel vacuum method water cooling flange

Water   cooling interface: φ10mm quick plug connector

Vacuum   system

Bipolar   rotary vane pump, pumping speed 1.1L/s

Ultimate   vacuum: 10-1Pa

Temperature   control System

Intelligent   temperature control meter temperature control

With   over-temperature protection

Temperature   measurement: K-type thermocouple

Water   chiller

Water   tank capacity 9L, Max. lift head 10m

Intake   port

φ10   Pagoda Head

Air   release valve

Manual   air release valve

Power   requirements

220V   50Hz, 24kW

Dimensions

1200mm   x 500mm x 480mm