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공정장비

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12인치 스테인리스 챔버 스핀코터

모델명 : CY-SPC12-C
  • - 기판 사이즈
  • - 회전 속도
  • - 가속도
  • - Speed resolution
제품 견적문의

상품상세정보

CY-SPC12-C spin coater is with vacuum chuck designed for easy and quick coating via sol-gel for wafers up to 12" diameter. This spin coater adopts advanced precision motor, the maximum speed can reach 5000rpm, which effectively guarantees the uniformity of film formation. Besides, the instrument adopts touch screen control, can preset the coating curve, which greatly simplifies the process.

Application:

The spin coater can coat liquid or colloidal materials on silicon wafers, crystals, quartz, ceramics and other substrates to form thin films. It is mainly used in photoresist spin coating, biological medium preparation, sol-gel method for polymer film production, etc.

Technical parameters:

Input power supply

AC220V, 50Hz

Chamber material

PP/Stainless steel (transparent acrylic upper cover)

Substrate size

Diameter≤12 inches (~300mm)

Spin speed

0-5000rpm

Acceleration

100-5000rpm/s

Speed resolution

1rpm

Single step time

3000s

Operation method

7 inches HD LCD touch screen

Dispensing method

Manual dispensing

Coating curve

Each curve has 5 segments, can store 5 curves in total

Vacuum chuck

Yes, include

Vacuum pump

Oil-less pump

Pumping speed

50 L/min

Total weight

~40kg