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6인치 프로그래머블 데스크톱 웨이퍼 스핀코터 (Vacuum Chuck)

모델명 : CY-VTC-200P
  • - 회전 속도
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Product Description

Anti-Corrosion Spin Coater ( 8000 RPM & 6" wafer Max.) with Complete Accessories

Introduction 

Anti-Corrosion Spin Coater is made of  Polypropylene (PP) material, which can be used for strong acidic or alkali solution, especially suitable for use inside glovebox under Ar gas.   Four vacuum chucks are included for coating wafer  from 10 mm to  6".  Digital control box is separated from spin coater which allow you operate in the remote location. The spinning speed is variable from 500-8000 rpm with two programmable segments. The package includes the oilless vacuum pump and 20ml syringe for immediate use.  
 
Specification 

Structure
  		Case and spin disk made of PolypropylenePolypropylene (PP) to resist most of the corrosive solutions.
Digital control box is separated from spin coater.
One filter is included in standard package. It is used to connect the pump and coater for preventing waste water from flowing into the pump.
One oil-less vacuum pump is included in the standard package
Input PowerDefault 220VAC, 50/60Hz,  single phase, 1000W Max.
110V is available in optional bar ( with 1500W transformer )
A power socket on the back of the Digital control box is used to supply power for the vacuum pump. (The output voltage of this power socket depends on the input voltage of the spin coater, e.g. if the spin coater is plugged into AC 110V, this power socket will supply AC 110V.)
Chamber  &Vacuum ChuckChamber diameter:  150 mm
4 sets of PP anti-corrosive vacuum chucks with different sizes ( Φ21mm,Φ38mm,Φ60mm,Φ100mm ), which can hold substrate from 10mm Dia to 6" Dia.
If your sample < 10 mm, please order rubber cup from us at extra cost

Spin Speed		Digital control panel with two programmable segments of different spin times and speeds
500 - 8000 RPM adjustable spinning speed  at each segment
Liquid Injecting20mL syringe is included to contain the coating material.
Optional:  
You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating
Using plasma cleaner to treat substrate surface before coating can improve film quality
You may consider our new product: Heatable syringe  
Motor 24VDC, Brushless,  200W max.:
Product Dimensions
 		Spin Coater: 25.2cm(Φ) x 41cm(H)
Digital controller: 23cm(L) x32cm(W) x16cm(H)
Net Weight25 kg 
ComplianceCE Certified
WarrantyOne year limited with lifetime support