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공정장비

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8인치 가열식(anti-corrosion) 스핀코터

모델명 : CY-SPC8-HAR
  • - 회전 속도
  • - 기판 사이즈
  • - 히팅 온도

상품상세정보

Anti-corrosion spin coater with heating cover adopts advanced precision motor, the maximum speed can reach 10,000rpm, which effectively guarantees the uniformity of film formation. In addition to the basic spin coating function, this product is also equipped with heating elements, which can be heated up to 200℃, temperature controlled by an intelligent temperature control meter, accurate temperature measurement, and completely controlled temperature rise process. In addition, the instrument adopts touch screen control and can preset the coating curve, which greatly simplifies the use process and reduces the learning cost. It is very suitable for laboratory purchase.



Anti-corrosion spin coater with heating cover application:

The spin coater can coat liquid or colloidal materials on silicon wafers, crystals, quartz, ceramics and other substrates to form thin films. It is mainly used in photoresist spin coating, biological medium preparation, sol-gel method for polymer film production, etc.



Anti-corrosion spin coater with heating cover technical parameters:



Item

Detail

Spin coater

Supply voltage

AC220V, 50Hz

Spin speed

0~10000rpm

Acceleration

100~5000rpm/s

Speed resolution

1rpm

Single step time

3000s

Substrate size

Diameter ≤ 8 inches (200mm)

Chamber material

PTFE

Heating temperature

≤200°C

Temperature control method

AIP intelligent temperature control

Operation method

7 inches HD LCD touch screen

Dispensing method

Manual dispensing, optional precision syringe pump

Coating curve

5 segments per curve, a total of 5 curves can be stored

Pumping port

Φ6mm quick screw interface

Overall size

290mm×365mm×300mm

Total Weight

15kg

Exhaust system

Vacuum pump

Dry mechanical pump

Pumping rate

1.1L/s

Power supply

AC220V 50/60Hz