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공정장비

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4 인치 가열식(anti-corrosion) 스핀코터

모델명 :
  • - 회전 속도 : 0-3000rpm
  • - 기판 사이즈 : Diameter ≤ 4 inches (100mm)
  • - 온도 : RT-200℃
제품 견적문의

상품상세정보

This product is a spin coater, also known as the spin processor, which uses centrifugal force generated by high-speed rotation to coat film materials. This model adopts a special design, so that the substrate can be heated simultaneously during the spin coating process. The maximum heating temperature is 200℃, which can meet the temperature requirements of some solutions in the spin coating process. At the same time, the equipment is also equipped with a liquid drain pipe and a waste tank to facilitate customers to collect waste liquid and effectively prevent corrosive liquid from splashing into the environment.



Technical parameters:


Power supply

AC220V, 50Hz

Chamber material

PTFE

Upper cover

PVC (Polyvinyl chloride, for observing the coating state conveniently)

Sample stage

Gold-plated copper plate, with good thermal conductivity

Substrate size

Diameter ≤ 4 inches (100mm)

Heating mode

Ceramic heating ring

Operating temperature

RT-200℃

Rotation speed

0-3000rpm

Speed resolution

1rpm

Operation Mode

7 inch HD LCD touch screen

Glue dropping mode

Manual glue dispensing, liquid can be supplied during spin coating

Liquid drain pipe and waste liquid tank

PTFE

Spin coating curve

Each curve has 5 segments, a total of 5 curves can be stored

Vacuum chuck

Gold-plated, 3 pieces with diameters of 10mm, 25mm, 55mm

vacuum pump

Oil-less pump

Pumping speed

50 L/min