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Compact DC Magnetron Sputtering Coater and Gold Target for Noble Metal Coating

모델명 : CY-VTC-16-D
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Product Description  

This equipment is a Desktop Magnetron Plasma Sputtering Coater with a 2" target head, height adjustable sample holder. Especially suit for coating conductive gold film for SEM sample. It is a compact plasma sputtering coater designed for metallic coatings, such as gold, platinum, and silver. One 2" gold (4N) target is included.
 

SPECIFICATIONS

Feature

Specially Designed for coating conductive gold film for SEM sample.Compact plasma sputtering coater designed

for metallic coatings, such as gold, platinum, and silver.One 2" gold (4N) target is included.

Input Voltage 220 VAC 50/60Hz, 200W< 1000 W (including vacuum pump power)
Output Voltage500 VDC
Sputtering current0 - 50 mA (max.) adjustable sputtering currentDigital current meter (mA)Over-current protection
Sputtering time1 -120 seconds adjustable
Specimen ChamberQuartz glass tube, 165 mm OD. x 152 mm ID x 145 mm
Specimen Stage
2" diameterheight adjustable, 30 - 80 mm from the sample to the target
Sputtering Head2" magnetron sputtering head.One manually operated shutter for target protection.
Vacuum Pressure

Digital vacuum pressure meter (Pa)KF25 vacuum pump connectorUltimate vacuum pressure 

1 Pa by the mechanical pump. The Pump is not included.

Vacuum pump (optional)

The double stage rotary vane pump is recommended. Optional: you may use a turbo pump to achieve

1.0E-5 Torr vacuum by a turbo pump

Input gas

One 1/4 Swagelok type tube fitting is installed for connecting the inert gas cylinder.One metering

valve is in the front panel for adjusting the input gas.

Target

One 50mm Dia. x 0.12mm gold target is included.  4N purity gold foil: 50 mm(2 inch) Dia. x 0.12 mm        

Optional Targets are available
       Au target (50 mm Dia. x 0.12 mm, 4N purity) 
       Pt target (50 mm Dia. x 0.12 mm, 4N purity)  
       Ag target (50 mm Dia. x 0.5 mm, 4N purity) 
       This model is suitable for coating Gold, Sliver, Platinium. And it is not suitable for coating light metallic 

material such as Al, Mg, Zn, or Carbon target due to low energy

Product Dimension and weightL 460 mm × W 330 mm × H 520 mm20kg
WarrantyOne year limited with lifetime support