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공정장비

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5L 플라즈마 클리너 (capacitive coupling)

모델명 :
  • - 챔버 사이즈 : 200x160x240mm
  • - 6 인치 웨이퍼
  • - 챔버 재질 : SS304
제품 견적문의

상품상세정보

Plasma cleaner is a new high-tech technology that uses plasma to achieve effects that cannot be achieved by conventional cleaning methods. Plasma is a state of matter, also called the fourth state of matter, and it is not the common three states of solid, liquid and gas. Apply enough energy to the gas to ionize and become a plasma state. The "active" components of plasma include: ions, electrons, atoms, active groups, excited nuclides (metastable states), photons, etc. The plasma cleaner uses the properties of these active components to treat the surface of the sample, so as to achieve the purpose of cleaning, coating, etc.



5L Plasma Cleaner Features:


The chamber has a large usable area, uniform glowing, and can clean 6-inch silicon wafers.



5L Plasma Cleaner Technical Parameters:


Main parts

Item

Parameters

Cleaning chamber

Chamber material

SS304

Chamber size

200x160x240mm

Coupling method

Capacitive coupling

RF power supply

Power supply features

The power supply is an all-solid-state RF power    

supply, and adopts a high-stability and high-reliability 

power amplifier   module and a DC module, which 

effectively ensures the RF power output of the   power supply. 

High quality electronic components are used to ensure the   

reliability of the products.

Power advantages

 Long time normal operation

 Simple and flexible operation

 High power supply efficiency and low heat   generation

With   perfect reflection power protection function

RF power

0~300W continuously adjustable

Signal frequency

13.56MHz ±0.005%

Reflected power

≤100W

Power stability

±0.1%

RF connector

N type connector

Machine efficiency

≥75%

Harmonic component

≤-50 dBc

Cooling method

Forced air cooling

Gas measurement

Measuring unit

Two-channel mass flow meter Ar 0~200sccm; 

O2 0~200sccm,   customizable

Other parameters refer to previous products

Vacuum

Vacuum measurement

Digital vacuum gauge (resistance gauge)

Vacuum pump

Two-stage rotary vane vacuum pump

Motor speed

50 Hz: 1440; 60 Hz: 1720

Pumping rate

50 Hz: 240L/Min; 60 Hz: 288L/Min

Vacuum range

0.1Pa～10000Pa

Ultimate vacuum

0.5Pa

Motor noise

≤56dB

Pipe interface

Gas inlet: KF16; exhaust port KF16.

Connecting pipe

KF16 vacuum bellows

Vacuum valve

KF16 ball valve

Motor Power

400W

Others

Power supply

AC220V 50/60Hz

Total power

800W

Operating temperature

-10℃--40℃

Working vacuum

≤40Pa

Overall size

600mm×650mm×560mm

Total Weight

80kg (including packaging)


Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.