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공정장비

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1200℃ 튜브 전기로

모델명 : CY-O1200X-RTP

Application of horizontal mini tube furnace

1.CVD experiment

2.Preparation of carbon nanotubes

3.Growth of graphene

4.Crystalline silicon substrate coating

5.Diffusion welding for metal materials

6.Heat treatment under the vacuum of atmosphere surroundings

Furnace Structure	1.Double layer steel structure.2.High purity Al2O3 fibrous insulation with Max. energy saving3.Equipped with double cooling fan, to make sure furnace body temperature low than 60℃
Model No.	CY-O1200X-RTP
Display	LED button controller or LCD touch panel( 5” &7” for your choice)
Limiting temperature	1200℃
Working temperature	≤1150℃
Heating rate	0-100℃/min
Heating zone length	400mm
Heating zone	Single zone
Max outer tube diameter	50mm,60mm,80mm,100mm for choice
Tube length for use	1000mm,1200mm,1400mm as customized
Temperature accuracy	± 1℃
Heating element	Fe-Cr-Al alloy adopt by Mo
Thermal couple	K TYPE
Max Power	2.5kw
Temperature control	30 steps programmable PID control
Chamber material	Alumina fiber
Over-temperature alarm	Yes
Over-current alarm	Yes
Working voltage: 220V 50Hz, or as customized