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공정장비

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1200 ℃ RTP 튜브 전기로

모델명 : CY-O1200-50IRTP
  • - 최대 온도 : 1150℃
  • - 작동 온도 : ≤1100℃
  • - with sliding rail and PID control touch panel
제품 견적문의

상품상세정보

    Application

    1.Rapid Thermal Annealing,ion implantation annealing

    2.Graphene CVD preparation, nanotube growthing

    3.Rapid thermal oxidation,Rapid thermal Nitriding

    4.Silicidation,diffusion,contact alloying,crystallization and densification


Model No.

CY-O1200-50IRTP

Display

7” LCD Touch Panel

Limiting temperature

1150℃

Working temperature

≤1100℃

Heating rate

0-100℃/min

Heating Zone length

400mm, constant temperature zone200mm

Corundum tube diameter

OD50*1200mm

Temperature accuracy

± 1℃

Heating element

Alchrome

Thermal couple

K TYPE

Cooling method

Double layer structure with fan cooling

Temperature control

30 steps programmable PID control

Chamber material

Alumina fiber

Over-temperature alarm

Yes

Over-current alarm

Yes

Sealing flange

S.S vacuum flange

Sliding method

Manual sliding

Cooling method

air forced cooling

Gas mixer

One way with Float Flow Controller

Main Power

4.5Kw

Working voltage

AC220V,50Hz