Smile, Smart, Speed
고객의 만족을 위하여 최선을 다하는 기업, 정문사이언스입니다.
고객의 만족을 위하여 최선을 다하는 기업, 정문사이언스입니다.
Powder Magnetron Sputtering Coating Machine for ITO oxide films
A powder magnetron sputtering coating
machine is a device used to deposit thin films on the surface of substrates by
converting powder-form target materials into a thin film using magnetron
sputtering technology. Below is a detailed explanation of its working principle
and applications.
The working principle of a powder magnetron
sputtering coating machine is primarily based on magnetron sputtering
technology. The specific steps are as follows:
Working Principle
Target Preparation:
The target material exists in powder form,
typically made of metals, alloys, ceramics, or other materials. These powder
targets are loaded into the target holder as the sputtering source.
Vacuum Environment:
The coating process is carried out in a
vacuum chamber to reduce the interference of gas molecules with the sputtered
particles, ensuring the stability of the deposition process and the quality of
the thin film.
Plasma Generation:
An inert gas (such as argon) is introduced
into the vacuum chamber, and a high-voltage electric field is applied to
generate plasma. High-energy ions (such as argon ions) in the plasma are
accelerated by the electric field and bombard the surface of the target
material.
Sputtering Process:
High-energy argon ions bombard the surface
of the powder target, causing atoms or molecules from the target material to be
ejected. These sputtered particles move freely in the vacuum and eventually
deposit on the substrate surface, forming a uniform thin film.
Magnetron Enhancement:
The magnetron device generates a magnetic
field that works in conjunction with the electric field, causing electrons to
form a circular motion near the target surface. This significantly increases
the ion bombardment density on the target surface, thereby improving the
sputtering efficiency.
Film Formation:
The sputtered target particles deposit on
the substrate surface, gradually forming the desired thin film. By controlling
the sputtering time, the type, and concentration of the target powder, the
thickness and composition of the film can be adjusted.
Powder magnetron sputtering coating
machines are widely used in the following fields:
Semiconductor Manufacturing:
Used for depositing various functional thin
films, such as conductive layers, insulating layers, and barrier layers, which
are crucial steps in semiconductor device manufacturing.
Optical Devices:
Applied in coating optical components to
form anti-reflective layers, filtering layers, or reflective layers, thereby
improving optical performance.
Protective Coatings:
Depositing wear-resistant coatings on tools
or mechanical parts, increasing surface hardness and corrosion resistance, thus
extending service life.
Decorative Coatings:
Used for depositing decorative coatings,
changing the color, gloss, or texture of objects, and widely applied in
jewelry, watches, and other fields.
Energy Sector:
Utilized in manufacturing transparent
conductive oxide (such as ITO) films for solar cells, as well as depositing
functional layers in energy storage devices.
Biomedical Devices:
Applied in the functionalization of
biomedical device surfaces, such as depositing antibacterial coatings or
biocompatible coatings on implants.
Advantages
The powder magnetron sputtering coating
machine is advantageous due to its compatibility with various materials and its
ability to control the uniformity and composition of the thin films, making it
an indispensable tool in industrial and research fields.
Technical Parameters of Magnetron
Sputtering Coating Machine:
Product name |
powder magnetron sputtering
coating machine |
|
Product model |
CY-MSH325-II-DCRF-SS-ZD |
|
Power supply voltage |
AC220V,50Hz |
|
Complete power |
6KW |
|
System vacuum |
≦5×10-4Pa |
|
Sample stage |
Dimensions |
φ150mm Vibration frequency
20Hz-20KHz |
Magnetron Sputtering Target |
Target size |
Diameter Φ50.8mm, thickness ≦3mm |
Cooling mode |
Circulating water cooling |
|
Water flow size |
Not less than 10L/Min |
|
Quantity |
2 |
|
Vacuum chamber |
Cavity size |
Diameter φ325mm |
Cavity material |
SUU304 stainless steel |
|
Observation window |
Diameter φ100mm |
|
Opening method |
Top opening |
|
Gas control |
1 mass flow meter is used to
control Ar flow, with a range of 200SCCM |
|
Vacuum system |
Equipped with 1 molecular pump
system, gas pumping speed 600L/S |
|
Film thickness measurement |
Optional quartz crystal film
thickness meter, resolution 0.10 Å |
|
Sputtering power supply |
Equipped with DC power supply,
power 500W RF power supply 500W |
|
Control system |
CYKY self-developed professional
control system |
|
Equipment dimensions |
570mm×1040mm×1700mm |
|
Equipment weight |
350kg |