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Desktop quartz cavity single target magnetron sputtering coating instrument

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제품 견적문의

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This equipment is a Desktop quartz cavity single target magnetron sputtering coating instrument,it can be used in the preparation of metal film,and also used in electronic fields,optical fields,special field of ceramic preparation ,it surely can be used in SEM sample preparation in laboratory。

This set is single-target magnetron sputtering coater equipped with high vacuum stainless steel cavity, the cavity is set with a quartz observation window baffle, which is easy to observe and record the experiment; The cavity design with excellent vacuum performance and small shape makes it very suitable for laboratory use. At the same time, the equipment is equipped with a rotating heating sample table, which can effectively improve the film uniformity and film quality. The machine adopts modular design, simple operation logic, and intuitive operation interface, easy to get started.

Technical Parameters：

product name

Desktop quartz cavity single target magnetron sputtering coating   instrument

Product number

CY-MSZ180-DC-Q

sample stage

 

Dimensions

φ100mm

Vibration frequency

20Hz-20000Hz

Magnetic target gun

Equipped with a two-inch magnetic   control target, target size: diameter 50.8mm, thickness ≦3mm

vacuum chambe

Cavity size

φ180mm X 200mm

observation window

omnidirectionally transparent

Cavity material

304 stainless steel

Opening method

Removable top cover

Vacuum system

 

Backing pump

Low noise bipolar rotary vane pump

Molecular pump

Low noise and high pumping speed   turbomolecular pump

Vacuum measurement

Composite vacuum gauge, range:   10-5~105Pa

Air extraction interface

KF16

Air extraction interface

KF40

Exhaust interface

KF16

System vacuum

1.0×10-4Pa

Power supply

AC 220V 50/60Hz

Pumping rate

The pumping speed of the molecular   pump is 600L/s, and the pumping speed of the backing pump is 1.1L/s.

Power configuration

 

Number of power supplies

A set of DC power supply

Output Power

DC power supply 300W

 

Other parameters

Supply voltage

AC220V,50Hz

Total power

2kW

Overall size

550mm X 350mm X450mm