제주장학재단

Device name

Rotating powder magnetron   sputtering coater CY-MSP180SRF-RPM

Characteristic

The powder material can be   coated on the surface: magnetron sputtering is used. When sputtering, the   powder material rolls in the cavity to achieve uniform coating on the powder   surface;

Can vacuum, through the   atmosphere

Basic parameter

Power supply :AC220V 50HZ

Power :<1500W

Radio frequency   power supply

Input power :220V 3A

Output power :0-300W

Output frequency: 13.56HZ

Cooling mode: The cooling mode   inside the equipment is air cooling

Size :444(L)*410(W)*128(H)

Magnetic control   target gun

2-inch magnetron sputtering head (with   water-cooled interlayer), connected to vacuum chamber with quick splice;

Target size requirements :φ50*(≦3mm)mm thick;

The 2-inch magnetron sputtering head can   withstand the maximum RF power :300w;

The 2-inch magnetron sputtering head can   withstand the maximum DC power :500W;

Target material

Suitable for sputtering gold,   silver, aluminum, copper and other metals, less damage to the substrate and   substrate temperature rise

A copper target, φ2   "*3mm, is standard

Target size requirement :φ2 "X(≦3mm)mm thickness

Sputtering chamber

The sputtering   chamber is a special-shaped furnace tube made of quartz glass, size:   (diameter 100+ 150+ 100) ×800 (mm);

The chamber can be   rotated, the speed is adjustable from 1-10rpm, the speed is adjusted by the   governor on the front panel, and the display screen shows the speed

The two ends of the   cavity are sealed by a quick connection between the magnetic fluid flanges   and the stainless steel sealing flanges, and a support frame is installed at   both ends of the flanges to support the magnetic fluid flanges. Remove the   magnetic fluid flanges at both ends and tilt the furnace body (controlled by   the knob on the front panel) to quickly discharge the material.

A φ6.35 sleeve   joint is installed on the left flange as the air inlet, a stainless steel   needle valve controls the air inlet and a mechanical pressure gauge with a   measuring range of -0.1-0.15MPa is used to observe the pressure inside the   furnace; A φ19mm through-hole is used to pass the   sputtering target head into the interior of the cavity

A φ8m pagoda   nozzle connector on the right flange is used as an air outlet, a stainless   steel needle valve controls the air outlet, a KF25 connector is connected to   the vacuum system, a KF16 interface is used as a backup interface, and a   digital display vacuum gauge can be installed optionally.

The right flange is   installed with a quartz baffle in the cavity, and four stainless steel baffle   bars are installed on the baffle to stir the dispersed material so that it   can be fully sputtered.

A guard is installed on the   top of the cavity to shield the plasma, and there is a quartz observation   port with a length and width of 240m at the top of the guard, which can   observe the sputtering of materials.

Heating system

The rotating quartz sputtering   cavity is coated with a heating device, which can realize the heating of the   rotating quartz sputtering cavity.

The heating system realizes   programmed temperature control through PID temperature control instrument.

The maximum heating   temperature allowed by chamber air tightness is 200℃. However,   the temperature of the heating system can be set without this limitation, and   the damage to the parts caused by operation at more than 200 ° C is not borne by the manufacturer.

Temperature control accuracy :±1°C

Vacuum system

Oil-free scroll vacuum pump;   Model :CY-GWSP600, parameters are as follows:

Exhaust speed :8.71/s; 31.3m3   /h

Limit vacuum :1Pa

Noise value: 36 LDB (A)

Leakage rate (exhaust port and   gas ballast valve closed):1*10-8Pa· m3 /s

Maximum inlet/exhaust pressure   :0.1/0.13MPa

Operating temperature :5~40C

Cooling method: air cooling

Inlet/exhaust port size:   KF40/KF16

Single-phase motor:

Power 0.75kW;

Voltage: ~ 115V(50Hz/60Hz);   200 ~ 230V50Hz/60Hz), two voltage options;

Speed: 1425(50Hz), 1725(60Hz)   rpm;

Joint form: National standard,   North America, Europe, UK/Ireland, India

Three-phase motor:

Power: 0.75kW;

Voltage: 200 ~ 230 and 380 ~   415(50Hz); Or 200 ~ 230 and 460(60Hz)V

Speed :1425(50Hz), 1725(60Hz)   rpm

Water cooling   equipment

Model :KJ-5000

Working current :1.4-2.1A

Cooling capacity :2361Btu/h

Size: 55X28X43cm(L X W X H)

Tank capacity :6L

Water flow rate :16L/min

Overall dimensions   of equipment

1500mm(L)*1000mm(W)*1500mm(H)   size when the shield is opened

Weight

About 100kg

Warranty period

1 year (excluding wear parts   such as sealing rings)

Matters needing   attention

The air pressure in the   chamber shall not be higher than 0.02MPa (relative pressure)

Due to the high pressure   inside the cylinder, when the gas is passed into the quartz tube, the   cylinder must be installed with a pressure reducing valve. In order to ensure   safety, it is recommended to use a pressure lower than 0.02MPa. It is   recommended to purchase a pressure reducing valve in our company.

For sample heating   experiments, it is not recommended to close the exhaust valve and intake   valve at the flange end of the furnace tube. If it is necessary to close the   air valve to heat the sample, it is necessary to always pay attention to the   indicator of the pressure gauge. If the pressure indicator is greater than   0.02MPa, the air relief valve must be opened immediately to prevent accidents   (such as furnace tube rupture, flanges flying out, etc.).

We do not recommend customers   to use flammable and explosive and toxic gases, if the customer process   reasons do need to use flammable and explosive and toxic gases, please do   their own relevant protection and explosion-proof measures. The company is   not responsible for any problems caused by the use of flammable, explosive   and toxic gases.