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공정장비

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Single target magnetron fiber winding sputtering coater

모델명 :
제품 견적문의

상품상세정보

This equipment is a single-target magnetron optical fiber winding sputtering coater, which is specially used for preparing thin films from optical fibers.

This set is equipped with a stainless steel high vacuum chamber, equipped with an observation window with a baffle, which can observe the coating process, and the baffle can effectively prevent the observation window from being shielded by the film layer, which is convenient for experimental observation and recording. The top-opening design of the cavity is convenient to open and easy to clean, which is very suitable for laboratory use. The whole machine adopts modular design, the operation logic is simple, and the operation interface is intuitive, which is convenient for getting started.

sputtering coater Technical Parameters:

product   name

product name

Product   number

CY-MSZ180-I-DC-SS

Supply   voltage

AC220V，50Hz

Total   power

2kw

Wire   winding mechanism

Dimension

Φ15mmx245mm

Winding   speed

1-300r/min

Magnetron   Sputtering Head

Quantity

2 inches x1

Colling   method

Wster cooling

Vacuum   chamber

Cavity   size

Φ213mm X 307mm

Observation   window

φ80mm

Cavity   material

Stainless Steel 304

Open   method

Top opening, left opening

Power   configuration

Number   of DC Power Supplies

1 set

Output   Power

≤300W

Matching   method

Automatch

Cooling   system

Tank   volume

9L

Flow

10L/min

Air   supply system

Type

Manual micro-control valve

 

 

Vacuum   system

Foreline   pump

Bipolar Rotary Vane Pump

Pumping   speed

1.1L/s

Secondary   pump

Turbomolecular pump

Pumping   speed

60L/s

Air   outlet

ISO63

Air   outlet

KF16

Vacuum   gauge

Compound Vacuum Gauge