Smile, Smart, Speed

고객의 만족을 위하여 최선을 다하는 기업, 정문사이언스입니다.

공정장비

HomeHOME > 회사소개 >공정장비

CY-MSP180G-PST Planetary single target magnetron sputtering coater

모델명 :
제품 견적문의

상품상세정보

CY-MSP180G-PST Planetary single target magnetron sputtering coater

This equipment is a desktop planetary single-target magnetron coater. The lower half of the cavity is made of stainless steel and the upper part is made of high-purity quartz. It has good vacuum performance and can accommodate complex sample stages.

This equipment is a desktop planetary single-target magnetron coater. The lower half of the cavity is made of stainless steel and the upper part is made of high-purity quartz. this magnetron sputting coater has good vacuum performance and can accommodate complex sample stages. The appearance of the equipment is desktop level, which greatly reduces the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering of metal and other conductive materials. The vacuum system of the equipment adopts turbomolecular pump group, which has fast pumping speed, high ultimate vacuum degree and excellent vacuum performance. This equipment has a compact structure and perfect functions and is easy to use, and is very suitable for various coating tests. 

Magnetron sputting coater technical parameters:

product name

single target magnetron sputtering coater

Product number

CY-MSZ180-50X-I-DC-Q

sample stage

Dimensions

φ50mm

Heating temperature

≦500℃

Adjustable speed

≦20rpm

Magnetic target gun

Equipped with a two-inch magnetic control   target, target size: diameter 50.8mm, thickness ≦3mm

vacuum chamber

Cavity size

φ180mm X100mm

observation window

omnidirectionally transparent

Cavity material

High purity quartz

Opening method

Removable top cover

Vacuum system

Backing pump

Low noise bipolar rotary vane pump

Molecular pump

Low noise and high pumping speed   turbomolecular pump

Vacuum measurement

Composite vacuum gauge, range: 10-5~105Pa

Air extraction interface

KF16

Air extraction interface

KF40

Exhaust interface

KF16

System vacuum

1.0×10-4Pa

Power supply

AC 220V 50/60Hz

Pumping rate

The pumping speed of the molecular pump   is 600L/s, and the pumping speed of the backing pump is 1.1L/s.

Power configuration

Number of power supplies

A set of DC power supply

Output Power

500W

Other parameters

Supply voltage

AC220V,50Hz

Total power

2kW

Overall size

550mm X 350mm X400mm