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Desktop single target magnetron sputtering coater with film thickness gauge

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Desktop single target magnetron sputtering coater with film thickness gauge

This equipment is a single-target magnetron coating apparatus, which can be used for the preparation of metal thin films. this Desktop single target magnetron sputtering coater can be used in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation.

This equipment is a single-target magnetron coating apparatus, which can be used for the preparation of metal thin films. this Desktop single target magnetron sputtering coater can be used in the fields of electronics, optics, and special ceramic preparation. It can also be used for laboratory SEM sample preparation.

This model can be equipped with a film thickness meter, which can monitor film thickness data in real time and provide reliable parameters for the experimental process.

Features:

Using a quartz vacuum chamber, the coating process is omnidirectionally visible, which is convenient for observation and recording of experiments.

The chamber design is convenient and easy to clean, which is very suitable for laboratory use.

At the same time, the equipment is equipped with a rotating heating sample stage, which can effectively improve the uniformity of the film and the quality of the film.

The whole machine adopts modular design, simple operation logic and intuitive operation interface, which is easy to get started.

Desktop single target magnetron sputtering coater technical parameters:

product name

Desktop double head magnetron sputtering   coating machine

Product number

CY-MSZ180-I-DC-Q

sample stage

Dimensions

φ100mm

Heating temperature

≦500℃

Adjustable speed

≦20rpm

Magnetic target gun

Equipped with a two-inch magnetic control   target, target size: diameter 50.8mm, thickness ≦3mm

vacuum chamber

Cavity size

φ180mm X215mm

observation window

omnidirectionally transparent

Cavity material

High purity quartz

Opening method

Removable top cover

Vacuum system

Backing pump

Low noise bipolar rotary vane pump

Molecular pump

Low noise and high pumping speed   turbomolecular pump

Vacuum measurement

Composite vacuum gauge, range: 10-5~105Pa

Air extraction interface

KF16

Air extraction interface

KF40

Exhaust interface

KF16

System vacuum

1.0×10-4Pa

Power supply

AC 220V 50/60Hz

Pumping rate

The pumping speed of the molecular pump   is 600L/s, and the pumping speed of the backing pump is 1.1L/s.

Power configuration

Number of power supplies

A set of DC power supply

Output Power

300W

Other parameters

Supply voltage

AC220V,50Hz

Total power

2kW

Overall size

550mm X 350mm X400mm

Note: 

This equipment does not contain a vacuum pump. Users should use it with a molecular pump set. We recommend our CY-GZK103A pump set.