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Desktop single sputter head magnetron sputtering coater CY-MSZ180-I-DC-Q

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Desktop single sputter head magnetron sputtering coater CY-MSZ180-I-DC-Q

Desktop single sputter head magnetron sputtering coater  is equipped with a DC power supply, which can be used for sputtering metal materials and has the characteristics of fast speed and low temperature rise.

This equipment is a desktop single sputter head magnetron sputtering coating machine. The miniaturized design of the equipment limits the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The Desktop single sputter head magnetron sputtering coater equipment is equipped with a DC power supply, which can be used for sputtering metal materials and has the characteristics of fast speed and low temperature rise.

Desktop single sputter head magnetron sputtering coater technical parameter:

Sample stage

Size

φ100mm

Heating

Max. 500℃

Rotating speed

0-20rpm adjustable

Magnetron sputtering head

Quantity  

2" x1

Vacuum chamber

Chamber size

φ180mm x 215mm

Observation window

Omnidirectional transparent

Chamber material

High purity quartz

Open method

Upper cover removable

Vacuum system

Mechanical pump

Rotary vane pump

Pumping port

KF16

Exhaust interface

KF16

Molecular pump

Turbomolecular pump

Pumping port

KF40

Exhaust interface

KF40

Vacuum measurement

Resistance gauge + ionization gauge

Ultimate vacuum

1.0E-4Pa

Power supply

AC 220V 50/60Hz

Pumping rate

Mechanical pump 1.1L/s Molecular pump 600L/s

Power configuration

Quantity

DC power supply x1

Max. output power

DC power supply 150W

Supply voltage

AC220V, 50Hz

Others

Total power

2kW

Overall size

550mm x 350mm x 400mm