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Desktop bottom-target magnetron sputtering coater

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Desktop bottom-target magnetron sputtering coater

This equipment is a desktop single-target magnetron sputtering coater. The equipment has been miniaturized and designed to limit the appearance of the equipment to the desktop level, greatly reducing the installation site requirements.

This equipment is a desktop single-target magnetron sputtering coater. The magnetron sputtering coater has been miniaturized and designed to limit the appearance of the equipment to the desktop level, greatly reducing the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering metal materials and has the characteristics of fast speed and low temperature rise. The whole vacuum chamber adopts the design of bottom target, which has good sputtering effect and less impurity pollution, which can protect the sample to the utmost extent.

magnetron sputtering coater technical parameters:

product name

Desktop bottom-single-target sputtering   coater with stainless steel cavity

Product number

CY-MSZ180X-I-DC-SS

sample stage

Dimensions

φ100mm

Heating temperature

≦500℃

Adjustable speed

≦20rpm

Magnetic target gun

Equipped with a two-inch magnetic control   target, target size: diameter 50.8mm, thickness ≦3mm

vacuum chamber

Cavity size

φ180mm X215mm

observation window

omnidirectionally transparent

Cavity material

304 stainless steel

Opening method

Removable top cover

Vacuum system

Backing pump

Low noise bipolar rotary vane pump

Molecular pump

Low noise and high pumping speed   turbomolecular pump

Vacuum measurement

Composite vacuum gauge, range: 10-5~105Pa

Air extraction interface

KF16

Air extraction interface

KF40

Exhaust interface

KF16

System vacuum

1.0×10-4Pa

Power supply

AC 220V 50/60Hz

Pumping rate

The pumping speed of the molecular pump   is 600L/s, and the pumping speed of the backing pump is 1.1L/s.

Power configuration

Number of power supplies

A set of DC power supply

Output Power

300W

Other parameters

Supply voltage

AC220V,50Hz

Total power

2kW

Overall size

550mm X 350mm X400mm