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Desktop single target magnetron sputtering coater with reciprocating sample table

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Desktop single target magnetron sputtering coater with reciprocating sample table

Desktop single target magnetron sputtering coater is a high cost performance magnetron sputtering coater equipment independently developed by our company, which has the characteristics of miniaturization and standardization. 

Desktop single target magnetron sputtering coater is a high cost performance magnetron sputtering coater equipment independently developed by our company, which has the characteristics of miniaturization and standardization. The magnetron target can be selected from 1 inch and 2 inches, and customers can choose according to the size of the substrate to be plated; the power supply is 150W DC power supply, which can be used for metal sputtering coating. The coating instrument is equipped with a vent interface, which can be filled with protective gas. If the customer needs to mix gas, you can contact the staff to configure a high-precision mass flow meter to meet the needs of the experiment. The instrument is equipped with advanced turbo molecular pump set, the ultimate vacuum can reach 1.0E-5Pa, and other types of molecular pumps are also available for purchase.

Desktop single target magnetron sputtering coater application range:

The equipment can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is compact in design, highly integrated, compact, and can be placed on a table for use. It is an ideal equipment for preparing material films in the laboratory.

Technical parameters of single target magnetron sputtering coater:

product   name

Desktop   single target magnetron coater with reciprocating sample table

Product   number

CY-MSZ180-50F-DC-Q

Reciprocating   sample table

size

50*100mm

Reciprocating   speed

0~50mm/s

Magnetron   target gun

Target   plane

Circular   flat target

Sputtering   vacuum

10Pa～0.2Pa

Target   diameter

2   inches

Target   thickness

Recommended   2 ～ 5mm

Target   temperature

≦65℃

Vacuum   chamber

Cavity   size

About   Φ180mm × H 215mm

Cavity   material

High   purity quartz

Observation   window

Omnidirectional   transparency

Opening   method

Removable   top cover

power   supply

DC   power supply

150W   max

Quantity

1

Molecular   pump system

Foreline   pump

 

 

Rotary   vane pump

VRD-4  

Pumping   speed

1.1L/S

Ultimate   vacuum

5*10-1Pa

Molecular   pump

Molecular   pumping speed

600L/S

Rated   speed

24000rpm

Ultimate   vacuum

5*10-5Pa

Vibration   value

≦0.1um

Start   Time

≦4.5min

Downtime

<7min

cooling   method

Water   cooling + air cooling

Water   cooler

Cooling   water temperature

≦37℃

Cooling   water flow rate

10L/min

Supply   voltage

AC220V   50Hz