Smile, Smart, Speed

고객의 만족을 위하여 최선을 다하는 기업, 정문사이언스입니다.

공정장비

HomeHOME > 회사소개 >공정장비

Organic and inorganic evaporation coater

모델명 :
제품 견적문의

상품상세정보

Organic and inorganic evaporation coater

Organic and inorganic evaporation coater adopts linear structure and is mainly composed of two organic material growth chambers which are connected by gate valves. One of the two growth Chambers is reserved for the butt joint interface with the glove box, which can complete the transfer of substrates between two independent film preparation systems. The organic material growth chamber mainly consists of vacuum chamber assembly, organic evaporation source, thermal resistance evaporation boat, sample transfer device, sample platform, film thickness monitor, vacuum chamber lighting device, baking device and so on.

Organic and inorganic evaporation coater specifications:

Vacuum chamber

Two D-shaped vacuum chamber, size: aboutΦ450×H750; Two   vacuum chamber of the vacuum system configuration, extreme pressure, vacuum   recovery time, thermal resistance evaporation boat and power supply, the film   thickness monitor, vacuum chamber lighting equipment, baking equipment,   sample platform configuration , The above configuration is the same as the   technical parameters

Vacuum system configuration

Japanese cryopump, oil-free vortex dry pump and electromagnetic valve, compound digital-displayed vacuum measurement auge and meter, valves etc.

Ultimate pressure

≤2.0×10-5 Pa

vacuum recovery time

Reach 1×10-4 Pa in 40 mins

Electric magnetic coupling sample transfer device

Vacuum chamber 1

It adopts magnetic coupling line motion   delivering device and is driven by stepper motor, It is equipped with remote   manual control box to control straight forward and backward

Organic evaporation source and power

Vacuum chamber 1

9 new model OEL sublimation evaporation   source, each filled with 10CC evaporation material, room temperature-800℃: 7;   room temperature-1000℃: 2; evaporation source power: 4

Vacuum chamber 2

6 new model OEL sublimation evaporation   source, each filled with 10CC evaporation material, room temperature-800℃: 6; room temperature-1000℃: 2; evaporation source power: 4

Heat resistance evaporation boat and power

New model evaporation boat: 2 (heat   resistance evaporation boat); digital heat resistance evaporation power: 1,   with fine adjustment function (0.1A); aluminum coated special purpose box   evaporation boat: 2; metal evaporation boat: 10; evaporation source baffle:   2.

Film thickness monitor

Thickness resolution ratio

Non-uniformity: 0.0133Å/measure; 50 samples   average: 0.002Å/measure

Velocity resolution ratio

Non-uniformity: 0.0133angstrom per second;   50 samples average: 0.02 angstrom per second

Precision

0.03HZ/measure, 2ppm

Speed

Measuring 10 times per second

Vacuum chamber lighting device

LED lighting outside chamber, to prevent film coating contaminate lighting

Baking device

A method of baking in a vacuum outdoor   baking strip

Sample stage

Sample size

Load one 100×100mm or 50×50mm substrate

Mode of motion

Power driven lifting, rotatable, rotating speed 0-30rpm, rotating speed adjustable