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Three sputter sources magnetron sputtering coater with UPS

Three target magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. this magnetron sputtering coater is standardized, modular and customizable.

Three target magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. this magnetron sputtering coater is standardized, modular and customizable.

This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, this three-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.

Technical parameters of Three target magnetron sputtering coater:

product name Three sputter sources magnetron   sputtering coater with UPS

Product number CY-MSH325-III-RFRFRF-UPS-SS

Supply Voltage VAC 220, 60Hz

UPS 20KVA 16KW, 1 hour delay

16 batteries, with capacity of 38AH

Vacuum Chamber Dimension: Dia. 325 mm * H 385 mm

Material: 304 stainless steel

Viewport (Window): ~4'' (100mm) with   shutter

Sample Stage Top sample holder

Sample table: Dia. 150mm

Sample size: Max. 4'' diameter

Rotary speed: 0-40rpm adjustable

Heating temperature: up to 700℃

Water Chiller Water flow rate: 2.3m3/h

Power: 3P

Cooling Capacity: 8250Kcal/h

Compressor output power: 2.25KW

Magnetron Sputtering Gun 3× 2'' magnetron sputter guns, with   automatic shutter

Sputtering orientation upwards

Target diameter: 2''

Magnets: rare earth magnet

RF Generator 3 × RF 300W power supply with   auto match

Power output range: 5W~300W

Maximum reflected power: 100W

Power stability: ±0.1%

Harmonic component: ≤-50dbc

Power supply: Single phase 187-253 VAC,   50/60HZ

Efficiency:  ≥70%

Power factor: ≥90%

Reflected power (at maximum power):   <3W

Maximum load current: 30ARMS

Maximum load voltage: 7500VRMS

RF output connector: 50 Ω, L29 or   customized

Match time: 1~3s

Real part range of matched impedance:   0~80Ω

Imaginary part range of matched   impedance:﹣200j~﹢200j

Cooling method: forced cooling

Mass Flow Meter 3 × MFC mass flow control (Ar, O2 and N2)

Measuring ranges: up to 20sccm

With pneumatic isolation valve(s) and   filter.

Full Automatic control by PC or PLC, to   control Store for minimum 100 recipe 

19'' Flat controller