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Small double sputter source magnetron sputtering coater

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Small double sputter source magnetron sputtering coater

CY-MSZ210-II-DCRF-SS small dual-target magnetron sputtering coating equipment has been miniaturized, while retaining the high-vacuum stainless steel cavity, while simplifying other mechanisms, greatly reducing the installation site requirements.

CY-MSZ210-II-DCRF-SSsmall dual-target magnetron sputtering coater equipment has been miniaturized, while retaining the high-vacuum stainless steel cavity, while simplifying other mechanisms, greatly reducing the installation site requirements. The magnetron sputtering coater equipment is equipped with a DC power supply and an RF power supply. The DC target can be used for sputtering of metals and other conductive materials. The RF power supply can be used for sputtering of various non-metals and metal oxides. The equipment vacuum system adopts all imported vacuum pumps, with fast pumping speed, high ultimate vacuum and excellent vacuum performance. The equipment has compact structure, perfect functions and easy to use. It is very suitable for various coating tests.

Technical parameters of magnetron sputtering coater equipment:

product name

Small double sputter source magnetron   sputtering coater

Product number

CY-MSZ210-II-DCRF-SS

Sample stage

Size

φ150mm

Rotating speed

0-20 adjustable

Heating

Up to 500℃

Magnetron sputtering target

Quantity

2” x2 dual targets share a baffle

Vacuum chamber

Chamber size

φ210mm x 230mm

Chamber material

SS304 stainless steel

Observation window

φ40mm

Opening method

Front door

Vacuum system

Mechanical pump

Imported oil-free diaphragm pump

Pumping interface

KF16

Molecular pump

Imported molecular pump

Pumping interface

KF40

Exhaust interface

KF16

Vacuum measurement

Resistance gauge + ionization gauge

Ultimate vacuum

1.0E-3Pa

Pumping rate

Oil-free pump 0.49L/s      Molecular pump: 40L/S

Power supply

AC 220V 50/60Hz

Power configuration

Quantity

DC power supply x1

RF power supply x1

Maximum output power

DC power supply 500W

RF power supply 500W

Other

Supply voltage

AC220V, 50Hz

Total power

2kW

Overall size

550mm x 550mm x1100mm