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Small desktop single-target DC magnetron sputtering coater CY-MSZ180-I-DG-Q

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The magnetron target head of the DC magnetron sputtering coater has 1 inch and 2 inches to choose from. Customers can choose the target according to the size of the substrate to be plated. The device is equipped with 150W DC power supply, which can be used for metal sputter coating. The coating machine is equipped with gas inlet port for the introduction of protective gas. If the customer needs the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs. The instrument is equipped with advanced turbomolecular pump set, the ultimate vacuum is up to 1.0E-5pa, and other types of molecular pumps are also available.

Small desktop single-target DC magnetron sputtering coater application:

The device can be used to prepare single-layer ferroelectric thin films, conductive films, alloy films, and so on. Compared with similar equipment, the single-target magnetron sputtering coater is compact, highly integrated and small in size, and can be placed on a desktop. It is an ideal equipment for laboratory preparation of material films.

Small desktop single-target DC magnetron sputtering coater technical parameters:

Sample stage

Size

φ138mm

Heating temperature

Max 500℃

Temperature accuracy

±1℃

Rotational speed

1-20rpm adjustable

Magnetron Sputtering head

Quantity

2”×1 (1”, 2” optional)

Cooling mode

Water cooling

Water chiller

Circulating water chiller with flow rate of 10L/min

Vacuum chamber

Chamber size

φ180mm×215mm

Chamber material

High purity quartz

Watch window

Fully transparent

Opening mode

Top cover removable

Mass flowmeter

2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs)

Vacuum system

Model

CY-GZK103-A

Molecular pump

CY-600

Backing pump

Rotary vane pump

Ultimate vacuum

1.0E-5Pa

Pumping interface

KF40

Exhaust interface

KF16

Vacuum measurement

Compound vacuum gauge

Power supply

AC;220V   50/60Hz

Pumping rate

Molecular pump: 600L/S rotary vane pump: 1.1L/S  

Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes

Power configuration

Quantity

DC power supply×1

Max output power

150W

Other parameters

Supply voltage

AC220V,50Hz

Total power

1.7KW (Vacuum pump 1.5KW+machine 0.2KW)

Overall size

500mm×350mm×400mm

Total Weight

About 30kg