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공정장비

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Multi-Function Coater Plasma Sputtering+Evaporating+Carbon Coating with Turbo Hi-Vacuum

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Basic Info

  • Model NO.: CY-GSL-1800X-SBC2
  • Structure: Desktop
  • Certification: CE, TUV
  • Type: Plasma
  • Transport Package: Ply Wooden Carton
  • HS Code: 8486109000
  • Customized: Customized
  • Material: Steel
  • Application: School, Lab
  • Trademark: CYKY
  • Origin: Zhengzhou, China

·         Product Description

·        

·         This machine is a floor-stand Multi-Function Film Coater, which integrates thermal evaporating, carbon coating and plasma sputtering coating into one machine and it can provide the coating for almost every material, including metallic, semiconductive and insulating materials. It is an excellent and cost-effective coating machine for research labs.

SPECIFICATIONS  

Input Voltage

220VAC, 10A, 50/60 Hz, single phase  ( < 2500W)

Input Power

< 2000W  (including pump)

Output Voltage (DC)

AC10V upto 100A Max. for thermal evaporationDC 3KV, 10mA for Plasma sputtering

Vacuum Chamber

Bell Jar made of pyrex glass250mm Dia. x 340mm HeightTwo inner glass tubes are included for radiation blockingOne is 88 mm ID x 140mm H for thermal evaporating The other one is 88 mm ID x 57mm H for plasma sputteringOne stainless steel mesh enclosure is included for blocking light radiation during thermal evaporation

Turbo Vacuum Pump

High-speed turbo vacuum pump system is installed bottom of the coaterVacuum speed:  600L/SVacuum level:  10e-6 torrEnvironmental working temperature:  < 32°C

Coating Source Assembling

Three sets of coating source assembling are included.                  

(1)   Dual heating station for thermal evaporating ( Pic lower left)Can evaporate two kinds of materials in same time.Max. temperature can reach 1800ºC  to evaporate almost all kinds of materials. Tungsten wire resistance heaters are included for immediate use.Spare Tungsten heater is available

(2)  One set for carbon coating Assembling two carbon rods are included for immediate use

(3)  One set for DC plasma sputteringOne gold target  ( 38mm Dia x 0.12 mm thickness) is included

Control Pannel

Control Panel allows you choose coating method and adjust sputtering current and evaporation power

Gas atmosphere

One needle valve installed to allow Ar gas flow to achieve better plasma coating

Overall Dimensions

L800mm× W560mm× H1340mm

Net Weight

150 kg

Shipping Weight & Dimensions

400 lbs; 52"x40"x54"

Warranty & Certificate

One years limited warranty with lifetime support
CE certified