제주장학재단

Parameter name

Parameter value

Input power supply voltage

380 V

The number of power supply phases

3

Input power supply frequency

50 Hz

Maximum output power

45 kW

Maximum operating   temperature

2300°WITH

The number of temperature control zones

1

The size of the working area

Diameter 140 mm, length 160 mm

Cold vacuum level

6.67*10-3 Pa

Flow rate

3 Pa/h

Means of temperature   control

0-1600°C - a tungsten-rhenium   thermocouple in a protective shell (the thermocouple shell   withstands heating up to 2000°WITH) 1600-2300°C - two-band Japanese infrared   pyrometer Chino (operating   wavelengths 0.9 μm and 1.55 μm, response   speed 2-15 ms)

Operating temperature control error

≤ ±1°WITH

Ability to work   in an inert environment

Yes

Inert medium

argon

Inert gas pressure in the working chamber

0.015 MPa

A means of control and monitoring of technical   processes

Programmable logic controller with a touch   display as part of the control unit

Design of the furnace vacuum chamber

Double-walled vertical cylinder with built-in water cooling system. The inner and outer layers are made of   SUS304 stainless steel. The inner walls of the chamber are polished to   a mirror shine (finishing   class no lessD6). The upper and lower flanges, made of stainless steel, are welded to the two-layer furnace shell.   The flange has a sealing groove in which   the sealing ring is fixed. The seal and flanges are   water-cooled to prevent aging of the seal ring, which further ensures   chamber tightness. The furnace body   has openings for the vacuum pump and thermocouple, and there is   a window on the side of the furnace for visual inspection. The bottom of the furnace body is integrated with a mechanical lifting device for loading and unloading.

Heater material

Energy-saving tungsten mesh (purity 99%). The grid is connected   to the electrodes. The transformer is connected   to 3 electrodes through copper   buses. The heating element, electrode and   transformer form a control circuit with low power consumption.

Thermal insulation of the furnace chamber

Made of 2 layers of   tungsten (inner layer) and 7 layers of   molybdenum (outer layer), connected by a SUS304 stainless steel holder.

Oven lid

It has a two-layer stainless steel construction with   built-in water cooling. The inner steel wall is polished to a   mirror shine (class of surface   treatment no lessD6).

Water cooling system of the furnace body

The water cooling system   consists of a system of pipes and taps, a   system of light and sound   emergency signaling and an emergency   shutdown of the power supply. The stove is   equipped with an   intelligent water cooling device, which is   used to cool the stove and related devices (water flow rate - 85 l/h, reserve water   capacity - 155 l, cooling capacity   29.5 kW).

Vacuum system

The   vacuum system consists of a plastic-rotor mechanical vacuum pump TRP-48 with a direct drive (pumping speed 14 l/s, maximum pressure 0.4 Pa); diffusion   pump (pumping speed 2000 l/s, limit pressure 0.00007 Pa); vacuum   shutter (Ø200 mm); inert gas inlet and outlet valves; vacuum filter;   pneumatic low-vacuum cranes;   composite vacuum gauge; stainless steel pipes.

The furnace is equipped with a small air compressor   that opens or closes the pneumatic valves.

A means of monitoring the vacuum level

A composite vacuum gauge with a digital display is used to measure vacuum, which can provide   continuous vacuum measurement   (measurement range – 100000 Pa – 0.00001 Pa).

Electric control system

The control system uses a   low voltage high current transformer.    Omron electrical components with high precision control are used. The electrical control cabinet is manufactured   according to Rittal standards and is easy   to operate.

The electrical system is controlled using programmable logic controllers, the parameters are   displayed on the touch screen. User   can set temperature, vacuum and program by touching the screen. It is possible to save technological   modes (temperature, vacuum and gas   consumption). The current state of all parameters is displayed directly on the touch screen. Temperature   control can be performed both automatically (thanks   to the automatic PID control function) and manually according to user requirements.

The system is equipped with the function of safe   use, shuts off the power in case of overheating, when the water   supply stops, has the necessary   light and sound alarm and a mandatory emergency   switch.

Heater power supply system

Low voltage and high current transformer   (converts 380V to 36V).

Vacuum chamber   opening system

The lifting device has a   two-layer stainless steel structure with   built-in water cooling. The furnace lid rises and falls with the help of a motor, which ensures   convenient access to the camera.