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공정장비

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Small plasma sputtering coater CY-PSP180G-1TA

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제품 견적문의

상품상세정보

This type of small plasma sputtering coating machine adopts two-stage sputtering method, which is widely used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage. This small plasma sputtering coater uses PLC control system, all touch screen operation, easy to learn and use. The equipment is small in size and beautiful in appearance, making it the best choice for laboratory coating experiments.

Small plasma sputtering coater technical parameters:

Item

Detail

Product model

CY-PSP180G-1TA

Sample stage

Diameter φ60mm, height adjustable

DC sputtering head

2"x1

Chamber material

High purity quartz

Chamber size

φ180mm x 100mm

Vacuum pump

Rotary   vane pump

Ultimate vacuum

1.0E-1Pa

Vacuum interface

KF16 vacuum flange

Gas inlet port

φ8 quick connector

Power supply

AC 220V 50Hz

Total power

1.5KW