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Touch Screen Compact Three Rotary Target Plasma Sputtering Coater

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제품 견적문의

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Product Description

3 Rotary Target Plasma Sputtering Coater w. Substrate Heater (500°C) Including 3 Targets
Introduction 
This machine is a CE certified compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500 °C. It can coat 1- 3 types of metallic materials to sample with diameter up to 50 mm. Three sputtering targets: gold, silver, copper are included for immediate use. 


Specification

Input Power

Single phase 220 VAC, 50 / 60Hz
700 W (including vacuum pump)
For using 110V AC, we will include a transformer for you. Please select the voltage in the Product Options

Output Power

1600 VDC
40 mA max

Vacuum Chamber

Vacuum chamber: 150 mm ID x 150 mm H, made of high purity quartz
Sealing flange made of stainless steel with flat O-ring

Sample Stage with Heater

Stage size: 50 mm Dia.
Sputtering distance range: 25 - 40 mm adjustable
Rotatable stage with three sputtering positions (controlled by the touch screen)
Substrate heater is built-in with a maximum heating temperature of 500 °C
PID temperature controller with +/- 1 °C accuracy is integrated to the touch screen

Control Panel
 

6" color touch screen with PLC integration for easy operation
Vacuum gauge, sputtering current meter, and substrate temperature control are integrated to the touch screen panel
Adjustment knobs on the front panel for gas intake and sputtering current control
Sputtering position, sputtering timer, and process logging are accessible from the touch screen

Shield

Stainless steel shield cage is included for extra protection

Sputtering Targets
 

Target size requirements: 47 mm Dia. x 2.5 mm max
Three targets are included in standard package for immediate use:
Au target, 47 mm Dia. x 0.12 mm
Ag target, 47 mm Dia. x 0.5 mm
Cu target, 47 mm Dia. x 2.5 mm

Vacuum Pump
(Optional)


 

Built-in KF25 vacuum port for connecting to a vacuum pump
Vacuum pump with KF25 connector is required, but not included. User may choose
A double stage mechanical vacuum pump for vacuum up to 10^-2 Torr
Or a turbo pump for vacuum up to 10^-4 Torr
Vacuum pump can be plugged in the power outlet on the left of coater for automatic control

Dimensions

440 mm L × 330 mm W × 455 mm H

Net Weight

50 kg