제주장학재단

Items

Detail

Supply   voltage

AC220V，50/60Hz

Maximum   power

10KW

Structure

Two   temperature controllers are used to control the top and bottom two sets of   heating elements respectively. A float flow meter is installed, and gas can   be introduced into the vacuum chamber.

Basic   parameters

Working   temperature: up to 800C Recommended heating rate: ≤10C/s (each temperature   zone is heated separately)

Temperature   control accuracy

Two   sets of infrared lamps are used as heating elements, which are located at the   top and bottom respectively. In order to reduce heat radiation and achieve a   faster cooling rate, the heating elements are installed in a stainless steel   shell with a water-cooled interlayer (the stainless steel shell is made of   316 stainless steel. It adopts thermal conductivity. A high rate aluminum   nitride ceramic sheet (5" X5^ Xo. 5nn] thickness) is used as the sample   stage to achieve better heating uniformity. The bottom sample stage. A 5° X5*   graphite crucible can be placed on it to hold the evaporated raw materials.

Temperature   Control System

Two   precise temperature control systems independently control the upper and lower   heating zones, and can set 30-stage heating and cooling programs. Each   temperature control system is equipped with over-temperature and couple-break   protection. PC communication interface, software can be installed, and the   temperature control program can be installed. and temperature curve imported   into the computer.

Temperature   measuring element

Two   K-type thermocouples. , mounted on the top and bottom, are in contact with   aluminum nitride ceramic sheets.

Precautions   for use

The   air pressure in the furnace tube should not be higher than 0.02MPa

Due   to the high air pressure inside the gas cylinder, a pressure reducing valve   must be installed on the gas cylinder when gas is introduced into the furnace   tube. It is recommended to purchase a pressure reducing valve in our company.   More precise and safe to use

The   air pressure in the furnace tube should not be higher than 0.02MPa

Due   to the high air pressure inside the gas cylinder, a pressure reducing valve   must be installed on the gas cylinder when gas is introduced into the furnace   tube. It is recommended to purchase a pressure reducing valve in our company.   will be more

add   precision and safety

When   the temperature of the furnace body is higher than 1000C, the furnace tube   cannot be in a vacuum state, and the air pressure in the furnace tube must be   equal to the atmospheric pressure and kept at normal pressure.

The   gas flow into the furnace tube should be less than 200SCCM to avoid the   impact of the cold atmospheric flow on the heating quartz tube

.   Long-term use temperature of quartz tube < 1100C

For   the sample heating experiment, it is not recommended to close the exhaust   valve and the intake valve at the flange end of the furnace tube. If you need   to close the air valve to heat the sample, you should always pay attention to   the indication of the pressure gauge. If the air pressure indication is   greater than

0.02MPa,   the vent valve must be opened immediately to prevent accidents (such as   furnace tube rupture, flange flying out, etc.)

The   gas flow into the furnace tube should be less than 200SCCM to avoid the   impact of the cold atmospheric flow on the heated quartz tube. The long-term   use temperature of the quartz tube is < 1100C

0.02MPa,   the vent valve must be opened immediately to prevent accidents (such as   furnace tube rupture, flange flying out, etc.)

Opening   method

Electric   lift cover

Flowmeter

Two-way   float flowmeter