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5 inch short distance evaporation coating furnace with stainless steel chamber

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제품 견적문의

상품상세정보

The short range organic evaporative coating furnace is a double heating zone rapid heat treatment furnace with an 11" outer diameter quartz tube. It is designed for PVD or CSS(Near sublimation) film coating 3 "diameter or 2" x 2". The short distance evaporation coating furnace uses two sets of halogen heaters (top and bottom) with a maximum heating rate of 20ºC/s. Two 30-segment precision temperature controllers are built in with an accuracy of +/-1ºC. Includes RS485 port and control software to allow furnace operation and temperature curve recording via PC. It is the main tool for studying the new generation of thin films for solar cells, such as CdTe, sulfide and perovskite solar cells.

5 inch short distance evaporation coating furnace Technical parameters:

Product name

5 inch short distance evaporation coating   furnace

Product model

CY-EVH350JJL-5"-SS

Structure

1. Two temperature controllers are used   to control the top and bottom heating elements respectively. A float   flowmeter is installed to allow gas to flow into the vacuum chamber

2. Vacuum chamber: 350 mm Dia x 300 mm h,   made of stainless steel

Observation window: 100 mm diameter

Opening mode: front door type

3. Vacuum flange is made of 316 stainless   steel, electric lifting

4. Two 5"x5" IR heating plates   with adjustable spacing.

5. The top sample holder can be rotated   at a speed of 0-7 RPM

Heating element and sample board

The heating element consists of 20   infrared lamps, which are located at the top and bottom

The distance between the two heating   tables can be adjusted by a DC motor

In order to reduce heat radiation and   achieve a faster cooling rate, the heating element is installed in a   stainless steel housing with a water-cooled sandwich (stainless steel housing   is made of 316 stainless steel).

Aluminum nitride ceramic sheet   (5"×5"×0.5mm thickness) with high thermal conductivity is used as   the loading platform to achieve better heating uniformity

A 5"×5" graphite crucible can   be placed on the bottom loading table to hold the evaporated material

When using this instrument, it is   necessary to use a circulating water cooler (KJ-5300 type, 16L/min).

Temperature control system

Two sophisticated temperature control   systems independently control the upper and lower heating zones, which can be   set up to 30 stages of cooling procedures

Every temperature control system comes   with ultra-mild break protection

Thermoelectric couple

Two type K thermocouples, mounted on the   top and bottom, are in contact with aluminum nitride ceramic sheets

Operating temperature

Maximum temperature per heater: RT-950℃.

Maximum temperature difference between   two heaters: < = 300ºC depending on the distance between the two   heaters:

The maximum distance is 30mm. Temperature   difference: 315ºC @ Heat the bottom only

Sample speed: 1-20RPM

Flowmeter

Two way float flowmeter

16 -160 mL/m

500 - 5000 mL/m

Vacuum pump

Equipped with a molecular pump system,   using one-click operation

600L/S, 1x10-5 Torr or more

Voltage

208V 60HZ three-phase