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공정장비

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Multi evaporation sources high vacuum evaporation coating equipment

모델명 :
제품 견적문의

상품상세정보

This equipment is a multi-source high-vacuum evaporation coating equipment. The equipment adopts a front-opening vacuum chamber design. The chamber has a large space and strong expandability, which can meet the evaporation coating of multiple types of large-size samples. The chamber has an upper sample stage inside, and the clamping or clamping type sample mounting parts can be selected according to the user's sample style. The sample table can be rotated, heated and raised and lowered, and all operations are integrated and controlled through the touch screen. The vacuum pump set of the equipment is a two-stage vacuum system, which is composed of a dual stage rotary vane vacuum pump and a turbo molecular pump. It can provide a clean and oil-free high vacuum environment for the vacuum coating test; the vacuum system contains a complete pneumatic valve system, and the user can One-touch operation through the touch screen realizes vacuuming, non-stop load and unload sample, complete shutdown and other operations.

The equipment has two sets of evaporation sources. It adopts a tungsten boat evaporation source and water-cooled copper electrodes. It can support a maximum current of 300A and a heating temperature of up to 3000℃. It can realize the evaporation of various refractory metals. This equipment adopts an integrated design, and the chamber and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively guarantees the safety of users. The electric control part adopts the design of the combination of touch screen and button panel. The vacuum system, sample table and other auxiliary functions are operated by the touch screen with one button. The evaporation and the film thickness control are operated independently by the panel, which is as convenient for users as possible while avoiding the possibility of wrong operation. The equipment is well-designed and has excellent performance, and it is an indispensable choice for laboratory high-precision evaporation coating test.

Technical parameters of multi-source high-vacuum evaporation coating equipment:

Sample stage

Size

Max support φ150mm sample

Height

Adjustable up and down 70mm

Evaporation source

Quantity

Tungsten Boat x2

Vacuum chamber

Chamber size

Dia. 300mm x 400mm

Chamber material

304 stainless steel

Observation window

                     

Front φ100mm with shading sheet

Opening method

Front door open

Film thickness control

Crystal vibrating film thickness measuring instrument, optional multi-channel film thickness controller

Vacuum system

Backing pump

Dual stage rotary vane pump

Pumping port

KF16

Secondary pump

Turbo molecular pump

Pumping port

CF160

Vacuum measurement

Resistance + ionization Compound vacuum gauge

Ultimate vacuum

1.0E-5Pa

Pumping rate

Rotary vane pump: 1.1L / S

Exhaust rate

Mechanical pump 1.1L / s     Molecular pump 600L / s

Power supply

AC 220V 50/60Hz

Flow meter

One channel mass flow meter 500sccm Ar gas

Control System

PLC automatic control

Operation interface: touch screen + operation panel

Other

Supply voltage

AC380V,50Hz

Total power

5kW

Machine size

1000mm x 800mm x 1500mm

Machine weight

350kg