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공정장비

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Multi-function coating machine Plasma Sputtering & Thermal evaporating & Carbon Co

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제품 견적문의

상품상세정보

The multi-function coating machine can perform vacuum carbon evaporation, vacuum thermal evaporation and plasma sputtering. It can also perform a variety of ion treatments under the protection of high-purity argon. By changing the function kit, the device can quickly switch between multiple functions, which is very suitable for making SEM samples in the laboratory. This instrument is equipped with a mechanical pump and a molecular pump, which can meet a variety of vacuum requirements, especially high vacuum, and can effectively improve the quality of coating.

multi-function coating machine technical parameters:

Product model

CY-PEC250G-HV

Vacuum chamber

Bell jar: φ250x340mm

Evaporated glass isolation cover size: φ88x150mm with side opening hole

Plasma sputtering coating glass isolation cover size: φ88x150mm

Intake system

Equipped with manual fine-tuning valve, the interface is 1/4 inch ferrule connector

Power requirements

AC 220V 50Hz

Plasma sputtering set

Sputtering voltage

1600V

Maximum current

50mA

Target size

2 inches

Working vacuum

10Pa~20Pa

Working atmosphere

Requires high purity argon

Thermal evaporation coating set

Number of evaporation sources

2

Max. current

100A

Working vacuum

10^-3Pa

Working   atmosphere

Do not need any gas.

Sample stage

Diameter φ60mm, rotatable

Carbon evaporation set

Evaporation method

Carbon rod evaporation

Max. current

160A

Working vacuum

10^-3Pa

Working atmosphere

Do not need any gas.

Vacuum system

Product model

CY-GZK103-A

Molecular pump

Turbomolecular pump

Backing pump

Two-stage otary vane pump

Pumping rate

Molecular pump: 600L/S

Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa

Rotary vane pump: 1.1L/S

Ultimate vacuum

5×10E-4Pa

Pumping port

KF40

Exhaust interface

KF16

Vacuum measurement

Compound vacuum gauge