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Organic Evaporation Coating Furnace

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Organic Evaporation Coating Furnace

 two heating zone rapid thermal processing  furnace with 11" I.D.quartz tube. It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3" diameter or 2"x2" square. The furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1ºC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC.  It is excellent tool to research new generation thin film for solar cell, such as CdTe, Sufide and Perovskite solar cell 

CY-1200X-RTP-II is a two heating zone rapid thermal processing  furnace with 11" I.D.quartz tube. It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3" diameter or 2"x2" square. The furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1ºC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC.  It is excellent tool to research new generation thin film for solar cell, such as CdTe, Sufide and Perovskite solar cell 

Two Zones CSS Furnace Specification:

Furnace structure &

 Vacuum Chamber

 

 

Furnace, two   temperature controllers, two channel gas flow meters are integrated into a   mobile aluminum alloy frame

The chamber is   made of high purity fused quartz tube

Quartz tube size:   11" OD/10.8" ID x 9" H

The vacuum flanges   are made of Stainless Steel 316

Vacuum Flanges

Top Flange with one KFD-25 vacuum port and one gas outlet (1/4"   pipe required) can slide up or down manually to load and unload substrate and   evaporated material easily

Bottom flange has one KFD-25 vacuum port with one gas inlet (1/4"   pipe required) with needle valves

Flange is sealed by double silicone o-rings and can achieve max.   vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by   molecular pump (vacuum pump is not included, please order separately)

One digital vacuum gauge is installed on the top flange. 

Precision annti-corrosion digital vacuum gauge is optional at extra   cost

Gas Flow Meters

 

 

Gas mixer integrated with two   float-meters with adjustable measurement ranges of:

16 -160 mL/m

500 - 5000 mL/m (for purging purpose)

Heater and Sample Holder

 

 

Two independently   controlled heaters with manually adjustable gap from 2 - 30 mm

20 pcs Halogen   lamps are used as heating element for rapid thermal processing.

Heaters are is   made of stainless steel with water cold jacket to reduce heat radiation and   allow for fast cooling.

5" dia.   circular wafer holder is built into top heater for holding substrate.

One set of high   thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) are included   (place on the back of substrate to make it heat uniformly).

A 16L/min   recirculating water chiller is included for saving water source

Temperature Controller

Two precision digital temperature   controllers with 30 segments programmable offer independent controlling of   top and bottom heaters

Each controller has PID auto tune   function to protect heaters from overshooting and alarm function to avoid   overheating and thermal couple broken

Working   Temperature

Max. temperature   for each heaters: <= 800ºC

Max. temperature   difference between two heaters: <= 300ºC depends on spacing between two   heaters:

Spacing 30mm  Max. temp difference:  315ºC @ heating bottom only

Heating & Cooling Rate

Heating: >   8ºC/s ( heating single heater only )

Cooling: >   10ºC/s (600 - 100ºC) Max.

Thermal Couple

Two K-type thermal couples are   installed on top and bottom heaters separately

Working Voltage

208 - 240VAC, single phase, 20A air   breaker

Power Requirement

2200W total ( 1100W for each   heater )

Warranty

One year limited with life time   support

Dimensions

1085mm L x 680mm W x 1710mm H