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공정장비

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Ultra-High Vacuum Thermal Evaporation Coater with Four Heating Sources (10-6 torr)

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Basic Info

  • Model NO.: GSL-1800X-ZF4
  • Structure: Desktop
  • Certification: CE, TUV
  • Type: Plasma
  • Transport Package: Ply Wooden Carton
  • HS Code: 8486109000
  • Customized: Customized
  • Material: Steel
  • Application: School, Lab
  • Trademark: CYKY
  • Origin: Zhengzhou, China

 

Product Description

GSL-1800X-ZF4 is a ultra-vacuum evaporation coater designed for coating oxygen sensitive metallic materials, such as Ti, Al, and Ir etc. It also can be used for coating all kinds of materials.  It has four evaporation heater sources and coat two type of materials at the same time at high vacuum up to 10-6 torr.  It is an excellent and cost-effective coating machine for research labs.


SPECIFICATIONS 

Input & Output Power

Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase  Total Power required:  8KW ( including pump)other 3 phase voltage is available upon requestOutput:  5VAC max.  and 300A Max.

Vacuum Chamber

Stainless steel chamber:  280mm ID. x 375 mm Height,(~23Liter)Sand-blasting electrolytic polishing surface  100 mm observation window  in front of chamberHinged type door for easy sample loadingManually operated shutters are on top of each evaporation W boat, which allow evaporating 4 kinds of material one by one4 KF40 ports built in chamber for connecting to necessary device

Vacuum Pump 

High-speed turbo vacuum pump is included and connected to the vacuum chamber.Vacuum speed:600L/SVacuum level:5.0x10-6Torr(after 40 minutes pumping )Limit vacuum:5.0x10-7Torr ( after baking at 100 -150°C)Leaking rate:5.0x10-7 Pa.Vacuum port:150 mm diameter

Evaporation Source & Sample Holder

Four tungsten heating boats are included  supported by water cold electrodesTungsten heating boat has dimension 70mm L x 12 mm W x 3 mm H.Each top of boat has a manual operation shutter Built in manual shutter allows evaporation source can be used without contamination100 mm diameter rotating sample holder is on top of the chamber with diameter 260mm, which can be heated up to 600°C max. via digital temperature controller with +/1 °C accuracyThe distance between evaporation source and sample holder is 150-300 mm adjustable      

Thickness control (optional)

One High-Resolution Film Thickness Monitor and Controller is optionalThe accuracy of thickness control is 1.0A

Control Unit

Vacuum, thickness and power control are integrated into one control boxControl Unit is separated from vacuum chamber for easy movingYou may place the control unit on the top of vacuum station 

Overall Dimensions

L600mm× W860mm× H1500mm

Net Weight

600 kg

Facility Requirement for Installation

Space:250 SF with height > 6 feetPower:208 - 240V AC, single phase with Max 10KW ( 50A breaker)Water:>15L/minute flowing water required for electrode cooling.

Warranty & Certificate

Two years limited warranty with lifetime support
       CE certified