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공정장비

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Small high vacuum thermal evaporation coater

모델명 :
제품 견적문의

상품상세정보

The instrument is a high vacuum compact thermal evaporation coater with evaporation temperature from 200℃ to 1700℃. The tungsten wire basket is used as the evaporation source, and the evaporation source is built in at the bottom of high purity alumina crucible. The upper cover is equipped with a rotatable sample stage, which can effectively improve the uniformity of film formation. The instrument has a high-precision temperature control system and uses circulating heating method, which can stabilize the evaporation of metals and organic matter. Stainless steel high-vacuum chamber design, with high-precision molecular pump, can achieve high vacuum requirements, the high vacuum can effectively improve the efficiency and quality of the evaporation coating.

Small high vacuum thermal evaporation coater application:

This equipment is suitable for evaporation coating of most metals and certain organic material films.

Small high vacuum thermal evaporation coater technical parameters:

Small high vacuum thermal evaporation coater

Sample stage

Size

Φ65mm

Distance to evaporation source

60mm~100mm   adjustable

Rotary speed

1-20rpm   adjustable

Evaporation system

Evaporation source

Tungsten wire basket

Max temperature

1700℃

Thermocouple

S type   thermocouple

Vacuum   chamber

Chamber size

φ170mm × 200mm

Observation   Window

Quartz   observation window φ70

Chamber material

Stainless steel

Opening way

Top cover open

Vacuum system

Model

CY-GZK103-A

Pumping   interface

KF40

Molecular pump

CY-600

Exhaust   interface

KF16

Backing pump

Rotary vane pump

Vacuum   measurement

Compound vacuum gauge

Ultimate   vacuum

1.0E-5Pa

Pumping ate

Molecular pump: 600L/S rotary

Rotary vane pump: 1.1L/S

comprehensive   pumping performance: 20 minutes vacuum up to: 1.0E-3pa

Other parameters

Supply voltage

AC220V,50Hz

Dimensions

600mm×300mm×470mm

Total power

1.5kw

Total weight

40kg