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공정장비

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Small high vacuum two-in-one film coater

모델명 :
제품 견적문의

상품상세정보

The plasma sputtering and evaporating two-in-one film coater is equipped with DC sputtering target and thermal evaporation assembly, which can be used not only for plasma sputtering, but also obtain carbon or other metal simple films by evaporation. In order to improve the coating quality, this two-in-one film coater adopts stainless steel vacuum chamber with high vacuum design of precision molecular pump, high vacuum degree can effectively improve the purity and uniformity of coating, which is conducive to get better experimental results. The sample stage has the function of rotation and heating, which can improve the film adhesion and film uniformity. The instrument is small in size, saves space, and can be placed on the test bench. It is very suitable for universities and research institutions.

Small high vacuum two-in-one film coater applications:

Scanning electron microscope sample surface gold spraying, steaming gold, carbon spraying and other operations, as well as the preparation of non-conductor material test electrodes.

Small high vacuum two-in-one film coater technical parameters:

Small high vacuum two-in-one film coater

Sample stage

Size

φ138mm

Temperature accuracy

±1℃

Heating temperature

Max 500℃

Rotary speed

1-20rpm adjustable

DC sputtering head

Quantity

2” ×1

Evaporation  system

Evaporation source

Tungsten wire basket

Max temperature

1700℃

Thermocouple

S type   thermocouple

Vacuum chamber

Chamber size

φ170mm × 200mm

Observation Window

Quartz observation window φ70

Chamber material

Stainless steel

Opening way

Top cover open

Vacuum system

Model

CY-GZK103-A

Pumping interface

KF40

Molecular pump

CY-600

Exhaust interface

KF16

Backing pump

Rotary vane pump

Vacuum measurement

Compound vacuum gauge

Ultimate vacuum

1.0E-5Pa

Pumping rate

Molecular pump: 600L/S rotary

Rotary vane pump: 1.1L/S

comprehensive pumping performance: 20 minutes vacuum up to: 1.0E-3pa

Sputter power configuration

Quantity

DC power supply×1

Max output power

150w

Other parameters

Supply voltage

AC220V,50Hz

Dimensions

600mm×300mm×470mm

Total power

1.5kw

Total weight

40kg