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공정장비

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Three-source evaporation coater with single-station glove box

모델명 :
제품 견적문의

상품상세정보

I. Equipment performance:

The coating equipment is mainly based on metal/organic source evaporation. It is suitable for the preparation of metal elements, oxides, dielectrics, semiconductor films, etc. in the laboratory. It can also be used for teaching and pre-process testing of production lines. , the expansion space is large, suitable for and meet the teaching and research work of colleges and universities.

II. The basic structure:

The coating equipment consists of vacuum chamber, metal/organic source system, sample stage system, vacuum pump set, film thickness monitor system, equipment rack, and electronic control system. The front door of the vacuum chamber can be connected to the glove box, and an integrated design scheme is adopted. The whole set of equipment is compact in structure and simple in layout, so as to avoid the messy appearance of experimental equipment.

III. Technical parameters:

1.Vacuum   Chamber

Appearance

1   set of high-quality 304 stainless steel D-shaped vacuum chamber, the internal   size of the vacuum chamber is D400*480mm, the front and rear double doors,   and the rear door adopts a hinged square door, which is convenient for   cleaning the vacuum chamber, internal debugging, maintenance and   pick-and-place samples;

The   front door adopts horizontal pull square door, and each front and rear door   is equipped with 1 set of DN100 windows;

Bottom

2   sets of metal source interfaces, 4 sets of organic source interfaces, 1 set   of molecular pump interface, 2 sets of lighting interfaces and 3 sets of film   thickness probe interfaces;

Top

1   set of sample stage interface, 1 set of electric baffle interface, 1 set of   high vacuum pneumatic baffle valve interface;

Left   side

1   set of high vacuum pneumatic flapper valve interface.

2.Metal/Organic   Source System

Metal   source

Quantity:   2 sets

2   sets of water-cooled copper electrodes, compatible with evaporation boats   (tungsten, molybdenum and tantalum boats) and spiral wires, equipped with   pneumatic baffles, 1 set of 1KW DC constant current power supply (digital   display), current adjustment accuracy 1A (fine adjustment), the power meets   common Evaporation of metals and metal oxides;

Organic   source

Quantity:   4 sets

4CC   quartz boat, 2 temperature control power supplies (temperature control meter   display accuracy 0.1°C), temperature range: RT~500°C (temperature control   accuracy ±1°C), with pneumatic baffle;

Baffle  

The   evaporation source is independent from each other, and the baffle is   separated to avoid cross contamination

3.Sample   Stage System

Substrate   rotation

The   speed is continuously adjustable from 0 ~ 30 rpm;

Substrate   lifting

Electric   lifting, the distance between the substrate and the evaporation source is 200~300mm   continuously adjustable through the touch screen;

Sample   holder

20*20mm   substrate 8 pieces

Substrate   shutter

Electric   shutter

4.Vacuum   System

Vacuum   pump set

1)   1 set of 600L/s molecular pump;

2)   1 set of 8L/s rotary vane pump

3)   1 set of CF150 high vacuum pneumatic gate valve;

4)   1 set of CF40 high vacuum pneumatic flapper valve;

5)   2 sets of KF16 high vacuum pneumatic flapper valves;

6)   1 set of KF40 high vacuum pneumatic flapper valve;

7)   1 set of KF40 vacuum solenoid valve;

8)   2 sets of KF40 pump valve connecting hoses, 1 set of KF40 tee;

9)   1 set of digital vacuum gauge (measurement range: 1×105～1×10-5Pa)

5.Film   Thickness Monitor System

Film   thickness meter

1   set of three-channel quartz crystal film thickness monitor

Film   thickness probe

3   sets of CF35 water-cooled film thickness probe

6.Equipment   Rack

1)   1 set of 40 carbon steel square tube welding frame;

2)   4 pieces of universal wheels, move and adjust;

3)   4 pieces of M16 feet, locked and positioned.

7.Electronic   Control System

Power   supply of metal source

1   set

Power   supply of organic source

2   sets (one for two)

Evaporation   source baffle power supply

1   set

Three-channel   quartz crystal film thickness monitor

1   set

Sample   table and its baffle power supply

1   set

Baking   lighting power supply

1   set

PLC   control

1   set, equipped with touch screen

Total   control power supply

1   set

8.     Single   Working Station Glove Box

(With   removable left side, no gas purification system and analyzers)

Chamber   size

L1200*   W750* H900mm

Gloves

1   pair

Large   antechamber

Inner   diameter 360mm, length 600mm

Small   antechamber

Inner   diameter 150mm, length 300mm

9.Other   Parameters

1)   Phase loss protection, misoperation protection, linkage interlock and one-key   vacuum start and stop functions;

2)   Power supply: ~220V two-phase power supply system (peak 3KW);

3)   Water supply: small chiller, cooling water temperature 5℃～35℃,   working environment temperature: 10℃～40℃;

4)   Air supply: small oil-free silent air pump, providing 0.2-0.3MPa air pressure   to drive pneumatic valves;

5)   Ultimate vacuum: 6×10-5Pa, the time from atmosphere to 6×10-4Pa   is less than 35 minutes (fill with dry nitrogen), shut down for 12 hours   vacuum degree≤10Pa.