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공정장비

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mpcvd diamond growing machine

모델명 :

Microwave Generator

◆10 kW SAIREM micro-wave generator (switch mode power supply)

◆2.45GHz Magnetron mirco-wave frequency

◆Circulator and isolator

◆Auto operated EH-tuning element

Plasma Source

◆6" plasma source ,excitation frequemcy 2.45GHz

◆Capable of operating in Low to High Power Density Plasma

◆Unique capabilities of temperature control at high power densities

◆Gas inlet into chamber from down side

◆Bias electrode

Substrate Holder

◆Exchangeable substrate holder with:

◆cooling element (appox D75mm)

◆Exchangeable holder plate for easy cleaning and maintenance

◆Molybdenum plasma contacting parts

◆Automatic height adjustment during growth

Charmber

◆Clamshell lid for easy-access substrate placement and cleaning

◆Water cooled Aulumium alloy structure

Gas Management System

◆5 gas lines including 5 mass flow controllers (addition on request)

◆MFC system

◆Pressure controller range: 100-300mbar

Vacumm

◆Turbo molecular pump+dry primary pump

CVD Controller

◆Computer controller recipe driven operation

◆Remote control, Detection,system upgrade

◆Substrate Camera (Optional)

◆ Pyrometer range: 400-1700°C

Growth Data

holder size of seeds (mm)	Number of seeds	Growth Days	Growth Height (mm)	Rough diamond weight(carat)	Total rough diamonds per cycle (carat)	Total rough diamonds per month (carat)	Diamond color before hpht	Diamond clarity before hpht
75mm	52	14	5	4.9	254.8	509.6	D/E/F/G	VS2+
75mm	40		5	6.4	256.0	512.0	D/E/F/G	VS2+
75mm	32		5	7.1	259.2	518.4	D/E/F/G	VS2+
75mm	26		5	10	260.0	520.0	D/E/F/G	VS2+