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공정장비

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1200 degree RTP tube furnace with sliding rail and PID control touch panel CY-O1200-50IRTP

모델명 :

Application

1.Rapid Thermal Annealing,ion implantation annealing

2.Graphene CVD preparation, nanotube growthing

3.Rapid thermal oxidation,Rapid thermal Nitriding

4.Silicidation,diffusion,contact alloying,crystallization and densification

Model No.	CY-O1200-50IRTP
Display	7” LCD Touch Panel
Limiting temperature	1150℃
Working temperature	≤1100℃
Heating rate	0-100℃/min
Heating Zone length	400mm, constant temperature zone200mm
Corundum tube diameter	OD50*1200mm
Temperature accuracy	± 1℃
Heating element	Alchrome
Thermal couple	K TYPE
Cooling method	Double layer structure with fan cooling
Temperature control	30 steps programmable PID control
Chamber material	Alumina fiber
Over-temperature alarm	Yes
Over-current alarm	Yes
Sealing flange	S.S vacuum flange
Sliding method	Manual sliding
Cooling method	air forced cooling
Gas mixer	One way with Float Flow Controller
Main Power	4.5Kw
Working voltage	AC220V,50Hz