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공정장비

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Two temperature zone tube furnace

모델명 :
제품 견적문의

상품상세정보

Two temperature zone tube furnace consists of a dual temperature zone tube furnace, a temperature controlled evaporator and a humidity monitor. The combination of the temperature-controlled evaporator and the humidity monitor can continuously produce water vapor that meets the test ratio requirements, that is, by observing the humidity monitor's indication, the rate of water vapor generation can be adjusted by adjusting the heating rate of the temperature-controlled evaporator accordingly. If combined with a three channel float flowmeter, precise control of the gas composition and humidity can be achieved, which is suitable for liquid source and chemical precursor transport in CVD processes.

The tube of the tube furnace horizontally passes through the furnace chamber, the heating element is evenly distributed around the circumference, the temperature field is uniform, and the internal and external temperature difference between the furnace tube and the furnace can be controlled at about 3℃. The furnace body is designed with a cushioned upper cover support structure for safe opening during operation.

The combination of the two-temperature zone vacuum tube furnace is mainly suitable for CVD tests and reactions requiring control of reaction humidity.

Two temperature zone tube furnace technical parameters:

Item

Detail

Two zone tube furnace

Supply voltage

AC110V;60Hz

Working temperature

≤1100℃

Heating rate

Recommended 10℃/min

Thermocouple type

B-type thermocouple

Furnace tube size

 φ80(OD)×φ74(ID)×1000(L)mm

Furnace tube material

High purity quartz

Sealing flange

Gas and vacuum interface with 1/4 inch

Heating zone

200mm+200mm

Temperature control

1) PID fully automatic control of heating rate, cooling rate and holding time

2) PID control over temperature protection and short protection

3) Over-temperature protection in the alarm   function allows the device to operate unattended

4) Temperature control accuracy is ±1℃(ie the displayed temperature and actual temperature difference)

Heating element

Electric furnace wire

Evaporator

Capacity

300mL

Heating jacket operating temperature

≤250℃

Features

With precision programmable temperature controller control;

There are two SS needle valves and a pressure gauge on the container

Humidity monitor

Installation method

KF25 adapter connected to the processing tube flange

Measuring range

0-100% RH, 1.5% FS accuracy, or -60° to   +60°DP

Measurement accuracy

±0.3°

Usage

Adjust the evaporator water temperature and H2 gas flow to achieve the desired humidity level

Three-channel anti-corrosion float flowmeter

Valve type

Stainless steel needle valve

Normal pipe condition

shut down

Gas mode

3 channels

Connection size

1/4"

Pressure range

-0.1~0.15Mpa

Tube core material

304 stainless steel