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공정장비

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gas mass flow controllers Gauge Pressure Controllers

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Fast & accurate. Custom valve sizing and PID tuning ensure controllers reach pressure setpoints in milliseconds and maintain control with NIST-traceable accuracy to ±0.125% of full scale.

Versatile control. Maintain absolute pressure (referenced to vacuum) or gauge pressure (referenced to local barometric pressure) immediately upon powering up, with readings displayed in your choice of engineering units.

Easy integration. Custom process ports and electrical connectors, and your choice of EtherNet/IP, EtherCAT, DeviceNet, Profibus, PROFINET, Modbus (RTU and TCP/IP), or serial communications for easy integration into your industrial process.

Device specs and customization options:

full scale Absolute

max 0–3000 PSIA; min 0–15 PSIA

Gauge

max 0–3000 PSIG; min 0–0.07 PSIG (2 inH₂O)*

Steady state control range

0.01% – 100% of full scale

Standard accuracy calibration, NIST-traceable

±0.25% of full   scale

Optional high-accuracy calibration, NIST-traceable

±0.125% of full   scale

Repeatability

0.08% of full scale

Typical control response time

as fast as 30 ms

Warm-up time

<1 s

Compatible gases

All non-corrosive gases

Operating temperature

10°C to +60°C

Burst pressure

3x full scale (1.5x full scale for 500 to 3000 PSI   devices)