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공정장비

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Laboratory Portable 13.56MHz 300W500W Auto-Match Plasma Digital RF Generator

모델명 : CY-RF
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Basic Info

  • Model NO.: CY-RF
  • Structure: Desktop
  • Certification: CE, TUV
  • Type: Reaction Type
  • Cooling: Air
  • RF Frequency: 13.56MHz
  • Trademark: CY
  • Specification: 500W
  • HS Code: 85141090
  • Customized: Customized
  • Material: Alloy
  • Application: School
  • Matching: Automatic
  • Output Type: N Type
  • Warranty: One Year
  • Transport Package: Wooden Box
  • Origin: Zhengzhou, China

 

Product Description

RF generator used in PECVD system
Introduction
13.56MHz RF generator upto 500W for DIY of PECVD (Plasma Enhanced Chemical
Vapor Deposition) for Plasma etching, Plasma cleaning, plasma polymerization etc.

SPECIFICATIONS
 

Noise

<50 dB

Output Power

5 -500W adjustable with ± 1% stability ( the power can be designed as your requirement)      

RF frequency

13.56 MHz ±0.005% stability

Reflection Power

200W max.

Matching

Automatic

RF Output Port

50 Ω, N-type, female

Cooling

Air cooling

Power

208-240VAC, 50/60Hz

Tube Size

50 - 130 mm ( 2''- 5'' OD)  ( larger diameter coil up to 11" diameter is available upon request )

Application

Combine with  tube furnace to get PECVD system

other details

can be desigbed as your requirement