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Mass Flow Controller (MFC) Gas Mixing System for Tube Furnace CVD System

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Basic Info

  • Model NO.: CY
  • Structure: Desktop
  • Certification: CE, TUV
  • Type: Measurement Type
  • Measurement Range: -0.1~0.15 MPa
  • Pipe Fitting: Stainless Steel
  • Trademark: CY
  • Specification: three gas channel
  • HS Code: 85141090
  • Customized: Customized
  • Material: Stainless Steel
  • Application: Lab
  • Voltage: 185~245V 50/60Hz
  • Gas Mixing Tank: Φ80X120mm
  • Warranty: One Year
  • Transport Package: Wooden Box
  • Origin: Zhengzhou, China

·         Product Description

·        

·         mass flow controller ( MFC ) for tube furnace CVD system

·         The gas control system is designed for the control of 1-4 types of gases flowing through vacuum-sealed tube furnaces at a low cost. The gas control system is installed in a heavy duty mobile 
cart where the tube furnace can be placed on the top. The front panel in the system has adjust 
valves and displays for the flow rate of gases. By combining with  tube furnaces, it can be used as CVD system and annealing furnace to study the gas environmental influence has on materials.
 
Specification
 

Function

Two Channels

Three Channels

Four Channels

Mass Flow 
Controller
 

Voltage: 185~245V 50/60Hz
Max. Output Power: 18W
Working Temperature: 
5~45C
Max. Pressure: 3x106 Pa
Accuracy: ±1% FS
Controlling Range:
Controller : 1~500 SCCM

Voltage: 185~245V 50/60Hz
Max. Output Power: 18W
Working Temperature: 
5~45C
Max. Pressure: 3x106 Pa
Accuracy: ±1% FS
Controlling Range:
Controller : 0~500 SCCM

Voltage: 185~245V 50/60Hz
Max. Output Power: 18W
Working Temperature: 
5~45C
Max. Pressure: 3x106 Pa
Accuracy: ±1% FS
Controlling Range:
Controller : 0~500sccm

Removability

4 heavy duty wheels included 
Max load: 500 Lbs

Mechanical 
Pressure 
Gauge

Measurement Range: -0.1~0.15 MPa (0.01 MPa/grid)

Needle 
Valve

316 Stainless Steel 

Pipe fitting

Pipe fitting: 1/4" stainless steel
12'' length 1/4" ID Nylon pipe for immediate use

Gas mixing 
tank

Φ80X120mm

Stop valve

316 stainless steel needle valve, Φ1/4" 

Dimension

600x600x650 mm

Compliance

CE certified 

Warranty

One year limited with lifetime support